New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures

• Bartosz Pruchnik,
• Krzysztof Kwoka,
• Ewelina Gacka,
• Dominik Badura,
• Piotr Kunicki,
• Andrzej Sierakowski,
• Paweł Janus,
• Tomasz Piasecki and
• Teodor Gotszalk

Beilstein J. Nanotechnol. 2024, 15, 1273–1282, doi:10.3762/bjnano.15.103

• FEBID nanostructures. We describe the basic parameters of the opMEMS bridge as a mechanical resonator. We show how the actuation can be used to control displacements with picometre resolution. We present how the intrinsic strain can be described by appropriate modelling and controlled through

Design, fabrication, and characterization of kinetic-inductive force sensors for scanning probe applications

• August K. Roos,
• Ermes Scarano,
• Elisabet K. Arvidsson,
• Erik Holmgren and
• David B. Haviland

Beilstein J. Nanotechnol. 2024, 15, 242–255, doi:10.3762/bjnano.15.23

• (KIMEC) sensors. A force sensor designed specifically for scanning probe microscopy must have a sharp tip that is readily positioned and scanned over a surface. We operate the sensor near a mechanical resonance with a high quality factor Q for enhanced responsivity to force. The mechanical resonator is a

• gradient during oscillation. Although many types of resonators could fulfill these requirements in principle, it is hard to beat the microcantilever for ease of fabrication. To sense force on the tip we need to measure the motion of the mechanical resonator, detecting its deflection from mechanical

• more detail. Sensor design We view the sensors as composed of the cantilever, which transduces force to displacement (transducer), and the microwave resonator, which detects the displacement (detector). For this reason, we separately discuss the mechanical resonator, the microwave resonator, and their

Intermodal coupling spectroscopy of mechanical modes in microcantilevers

• Ioan Ignat,
• Bernhard Schuster,
• Jonas Hafner,
• MinHee Kwon,
• Daniel Platz and
• Ulrich Schmid

Beilstein J. Nanotechnol. 2023, 14, 123–132, doi:10.3762/bjnano.14.13

• expertise. For inspiration, we turn to quantum optomechanics and its sister field of quantum electromechanics, as they both report outstanding signal-to-noise ratios [14]. In the former, a reflective mechanical resonator constitutes half of a Fabry–Pérot cavity, converting photons to phonons and vice versa

• coupling was proven in doubly clamped beams, square membranes and circular membranes [18][26][27][28][29][30][31]. For atomic force microscopy imaging, a slight angle between the sensing mechanical resonator and the sample of interest is required, ensuring that the only contact occurs between the sample

• surface and the tip of the mechanical resonator. This promotes cantilevers as the chosen geometry for this task, as building a clamped beam or a square membrane at the edge of a chip is considerably more challenging. In the following, we will explore intermodal coupling in a microcantilever as an

The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

• Victor Deinhart,
• Lisa-Marie Kern,
• Jan N. Kirchhof,
• Sabrina Juergensen,
• Joris Sturm,
• Enno Krauss,
• Thorsten Feichtner,
• Sviatoslav Kovalchuk,
• Michael Schneider,
• Dieter Engel,
• Bastian Pfau,
• Bert Hecht,
• Kirill I. Bolotin,
• Stephanie Reich and
• Katja Höflich

Beilstein J. Nanotechnol. 2021, 12, 304–318, doi:10.3762/bjnano.12.25

• -mat are presented. Keywords: automated patterning; focused He ion beam; graphene; magnetic multilayers; mechanical resonator; pattern generation; plasmonic antennas; two-dimensional materials; Introduction Future breakthroughs in nanotechnology will rely on the ability to fabricate materials and

Hexagonal boron nitride: a review of the emerging material platform for single-photon sources and the spin–photon interface

• Stefania Castelletto,
• Faraz A. Inam,
• Shin-ichiro Sato and
• Alberto Boretti

Beilstein J. Nanotechnol. 2020, 11, 740–769, doi:10.3762/bjnano.11.61

Finite-size effect on the dynamic and sensing performances of graphene resonators: the role of edge stress

• Chang-Wan Kim,
• Mai Duc Dai and
• Kilho Eom

Beilstein J. Nanotechnol. 2016, 7, 685–696, doi:10.3762/bjnano.7.61

• range of nanomechanical resonator is attributed to the fact that the scaling down of a mechanical resonator leads to an increase of its resonant frequency. Specifically, the resonant frequency (ω) of a nanomechanical device is inversely proportional to the square root of its length (L), i.e., . The high