Determination of the radii of coated and uncoated silicon AFM sharp tips using a height calibration standard grating and a nonlinear regression function

• Perawat Boonpuek and
• Jonathan R. Felts

Beilstein J. Nanotechnol. 2023, 14, 1200–1207, doi:10.3762/bjnano.14.99

• . However, this method yields an accurate estimate of the tip radius with a low root mean squared error of the curve fitting results. Keywords: AFM tip calibration; nonlinear regression curve fitting; Introduction Atomic force microscopy (AFM) with a sharp tip is typically used to characterize

• similar curved profiles, but different curvature radii. The curve fitting results indicated that our estimation model is reasonably accurate. However, more accuracy could be achieved if we had more data points of the AFM tip position in the curved scan profile for nonlinear regression curve fitting. SEM