With the progress in fabricating more energy efficient and sustainable devices, an increased need for advanced materials and processing techniques arises that becomes increasingly challenging and demands for new analysis techniques. In particular excellent spatial resolution together with high-sensitivity chemical information at the nanoscale are of utmost importance for future developments. These nanoanalytical techniques need detailed understanding of the physical processes included in both the device structures and detection techniques. A typical setup includes a probe (such as tip, ion beam or electron beam), the condition of the sample and the interaction between them, which all need to be extensively investigated by simulations and modeling in order to obtain an in-depth and reliable understanding and accurate physical models. Furthermore, a reliable and easy way to extract a maximum of information out of the multimodal datasets, efficient data visualization strategies, and methods for analysis, mining and modeling are of utmost importance. This Thematic Series groups six exciting articles around the aforementioned aspects of nanoanalytics, describing the development of both new instrumentation as well as new methodologies.