Magnetic properties of optimized cobalt nanospheres grown by focused electron beam induced deposition (FEBID) on cantilever tips

• Soraya Sangiao,
• César Magén,
• Darius Mofakhami,
• Grégoire de Loubens and
• José María De Teresa

Beilstein J. Nanotechnol. 2017, 8, 2106–2115, doi:10.3762/bjnano.8.210

• work, we present a detailed investigation of the magnetic properties of cobalt nanospheres grown on cantilever tips by focused electron beam induced deposition (FEBID). The cantilevers are extremely soft and the cobalt nanospheres are optimized for magnetic resonance force microscopy (MRFM) experiments

• . Keywords: cobalt nanostructures; electron holography; focused electron beam induced deposition; magnetic deposits; magnetic resonance force microscopy; Introduction Through the local decomposition of magnetic precursor molecules by the action of an incoming electron beam, a wide range of functional

• magnetic nanostructures have been produced in last years by the focused electron beam induced deposition (FEBID) technique [1][2]. The extensive list of nanostructures includes: (a) planar deposits in the shape of Hall bars for sensing purposes [3][4][5][6]; (b) magnetic nanopillars for functionalization

Fixation mechanisms of nanoparticles on substrates by electron beam irradiation

• Daichi Morioka,
• Tomohiro Nose,
• Taiki Chikuta,
• Kazutaka Mitsuishi and
• Masayuki Shimojo

Beilstein J. Nanotechnol. 2017, 8, 1523–1529, doi:10.3762/bjnano.8.153

• produced by focused electron beam induced deposition (FEBID) [6], photo-lithography (PL), or micro-contact printing (μCP) [7]. However, the purity of the deposits from FEBID is generally low, and PL and μCP require complicated processes including the fabrication of masks or masters, exposure or stamping

3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity

• Brett B. Lewis,
• Robert Winkler,
• Xiahan Sang,
• Pushpa R. Pudasaini,
• Michael G. Stanford,
• Harald Plank,
• Raymond R. Unocic,
• Jason D. Fowlkes and
• Philip D. Rack

Beilstein J. Nanotechnol. 2017, 8, 801–812, doi:10.3762/bjnano.8.83

• , grain structure/morphology, and electrical resistivity of 3D platinum nanowires synthesized via electron beam induced deposition with and without an in situ pulsed laser assist process which photothermally couples to the growing Pt–C deposits. Notably, we demonstrate: 1) higher platinum concentration

• : additive manufacturing; beam induced processing; 3D printing; direct-write; electron beam induced deposition; microscopy; nanofabrication; pulsed laser; purification; rapid prototyping; Introduction The first fully incorporated 3D transistor logic was reported in 2012 [1]. Further 3D device concepts and

• of success. Recently, electron beam induced deposition (EBID) was extended to 3D nanoscale mesh geometries [11]. Deposition occurs during EBID as the nanoscale focused electron beam dissociates adsorbed precursor molecules. A condensed byproduct accumulates by prolonged electron exposure with the

Signal enhancement in cantilever magnetometry based on a co-resonantly coupled sensor

• Julia Körner,
• Christopher F. Reiche,
• Thomas Gemming,
• Bernd Büchner,
• Gerald Gerlach and
• Thomas Mühl

Beilstein J. Nanotechnol. 2016, 7, 1033–1043, doi:10.3762/bjnano.7.96

• individual nanotube was picked from a forest of FeCNTs grown by chemical vapor deposition [10] by a Kleindiek micromanipulator and placed at the free end of the cantilever. Electron beam-induced deposition of amorphous carbon on the contact point between FeCNT and cantilever ensures a strong attachment of

Efficient electron-induced removal of oxalate ions and formation of copper nanoparticles from copper(II) oxalate precursor layers

• Kai Rückriem,
• Sarah Grotheer,
• Henning Vieker,
• Paul Penner,
• André Beyer,
• Armin Gölzhäuser and
• Petra Swiderek

Beilstein J. Nanotechnol. 2016, 7, 852–861, doi:10.3762/bjnano.7.77

• electron beam induced deposition (FEBID) [1][2] solid materials are produced on surfaces through decomposition of volatile precursor compounds under the electron beam [1][3][4]. As an alternative to deposition from the gas phase, FEBID has recently also been performed in micrometer-thin films of molten

• contamination. The reduction of the material under high-vacuum conditions also offers the perspective of adding capping layers in situ via an electron-beam induced deposition process from the gas phase [1] thus addressing the problem of Cu oxidation [52]. (a) Representative RAIR spectra of surface-grown copper

Correction: Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

• Aleksandra Szkudlarek,
• Alfredo Rodrigues Vaz,
• Yucheng Zhang,
• Andrzej Rudkowski,
• Czesław Kapusta,
• Rolf Erni,
• Stanislav Moshkalev and
• Ivo Utke

Beilstein J. Nanotechnol. 2015, 6, 1935–1936, doi:10.3762/bjnano.6.196

• nanocrystals; focused electron beam induced deposition (FEBID); post-growth annealing of Cu–C material; In Figure 8 of the original article, the scale of the ordinate was wrong. The correct figure looks as follows: Figure 8 in the original article: Calculated resistivity from the resistance measurement of a

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

• Rachel M. Thorman,
• Ragesh Kumar T. P.,
• D. Howard Fairbrother and
• Oddur Ingólfsson

Beilstein J. Nanotechnol. 2015, 6, 1904–1926, doi:10.3762/bjnano.6.194

• ; focused electron beam induced deposition (FEBID); low-energy electron-induced fragmentation; neutral dissociation; Review 1 Introduction Focused electron beam induced deposition (FEBID) [1][2][3] is a direct-write method capable of creating nanostructures with potential scientific and industrial

• and carbon in the deposits remains an open question in these studies. However, as the bulk of the oxygen is bound as CoO, the nitrogen is likely bound as the respective cobalt nitride. Focused electron beam induced deposition of Co(CO)3NO at elevated substrate temperatures [80] leads to a substantial

• Rachel M. Thorman Ragesh Kumar T. P. D. Howard Fairbrother Oddur Ingolfsson Science Institute and Department of Chemistry, University of Iceland, Reykjavík, Iceland Department of Chemistry, Johns Hopkins University, Baltimore, Maryland, USA 10.3762/bjnano.6.194 Abstract Focused electron beam

Focused particle beam-induced processing

• Michael Huth and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2015, 6, 1883–1885, doi:10.3762/bjnano.6.191

• nanoscale. However, in contrast with large-scale 3D printing of plastic or metallic structures, FPBID provides nanomaterials with a wealth of interesting electronic, optical and magnetic properties. Due to this, focused electron beam-induced deposition (FEBID) has experienced a rapid expansion in the

• nanowires [7]. In the article by Oleksandr Dobrovolskiy and colleagues [8], different postgrowth purification treatments for platinum and cobalt FEBID structures are employed to fine-tune the magnetic properties of heterostructures. A novel application of electron beam-induced deposition of amorphous carbon

Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

• Aleksandra Szkudlarek,
• Alfredo Rodrigues Vaz,
• Yucheng Zhang,
• Andrzej Rudkowski,
• Czesław Kapusta,
• Rolf Erni,
• Stanislav Moshkalev and
• Ivo Utke

Beilstein J. Nanotechnol. 2015, 6, 1508–1517, doi:10.3762/bjnano.6.156

• study in detail the post-growth annealing of a copper-containing material deposited with focused electron beam induced deposition (FEBID). The organometallic precursor Cu(II)(hfac)2 was used for deposition and the results were compared to that of compared to earlier experiments with (hfac)Cu(I)(VTMS

• conventionally and by laser-induced heating in the scanning electron microscope chamber. Keywords: Cu(hfac)2; Cu nanocrystals; focused electron beam induced deposition (FEBID); post-growth annealing of Cu–C material; Introduction Focused electron beam induced deposition (FEBID) is a direct maskless

Influence of the shape and surface oxidation in the magnetization reversal of thin iron nanowires grown by focused electron beam induced deposition

• Luis A. Rodríguez,
• Lorenz Deen,
• Rosa Córdoba,
• César Magén,
• Etienne Snoeck,
• Bert Koopmans and
• José M. De Teresa

Beilstein J. Nanotechnol. 2015, 6, 1319–1331, doi:10.3762/bjnano.6.136

• Aragón (ICMA), Universidad de Zaragoza-CSIC, 50009 Zaragoza, Spain 10.3762/bjnano.6.136 Abstract Iron nanostructures grown by focused electron beam induced deposition (FEBID) are promising for applications in magnetic sensing, storage and logic. Such applications require a precise design and

• ; focused electron beam induced deposition; iron nanowires; magnetization reversal; magneto-optical Kerr effect; transmission electron microscopy; Introduction The fabrication of magnetic nanostructures in a single lithographic step by focused electron beam induced deposition (FEBID) is currently an

• nanowires grown by focused electron beam induced deposition (FEBID) has been carried out. It has been found that the coercive field decreases for increasing thickness and width in the range of dimensions studied. In the particular case of HC vs thickness for nanowires with constant width (250 nm

Structural transitions in electron beam deposited Co–carbonyl suspended nanowires at high electrical current densities

• Gian Carlo Gazzadi and
• Stefano Frabboni

Beilstein J. Nanotechnol. 2015, 6, 1298–1305, doi:10.3762/bjnano.6.134

• –carbonyl precursor (Co2(CO)8) by focused electron beam induced deposition (FEBID). The SNWs dimensions are about 30–50 nm in diameter and 600–850 nm in length. The as-deposited material has a nanogranular structure of mixed face-centered cubic (FCC) and hexagonal close-packed (HCP) Co phases, and a

• graphitized C. The breakdown current density is found at 2.1 × 107 A/cm2. The role played by resistive heating and electromigration in these transitions is discussed. Keywords: cobalt; electromigration; focused electron beam induced deposition (FEBID); metallic nanowires; Introduction The growing importance

• of nanotechnology and nanoscience in advanced applications and fundamental research requires nanofabrication techniques that are highly resolved but at the same time flexible and feasible with research laboratory equipment. A promising approach is represented by focused electron beam induced

Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

• Francesc Salvat-Pujol,
• Roser Valentí and
• Wolfgang S. Werner

Beilstein J. Nanotechnol. 2015, 6, 1260–1267, doi:10.3762/bjnano.6.129

• /bjnano.6.129 Abstract The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible

• present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations. Keywords: focused-electron-beam-induced deposition (FEBID); Monte Carlo simulation

• , including a number of spectroscopies (electron-energy-loss spectroscopy, X-ray photoelectron spectroscopy, and Auger-electron spectroscopy), electron microscopy, and the focused-electron-beam-induced deposition (FEBID) of nanostructures, on which we focus here. This technique employs beams of focussed

Tunable magnetism on the lateral mesoscale by post-processing of Co/Pt heterostructures

• Oleksandr V. Dobrovolskiy,
• Maksym Kompaniiets,
• Roland Sachser,
• Fabrizio Porrati,
• Christian Gspan,
• Harald Plank and
• Michael Huth

Beilstein J. Nanotechnol. 2015, 6, 1082–1090, doi:10.3762/bjnano.6.109

• heterostructures on the lateral mesoscale. By means of in situ post-processing of Pt- and Co-based nano-stripes prepared by focused electron beam induced deposition (FEBID) we are able to locally tune their coercive field and remanent magnetization. Whereas single Co-FEBID nano-stripes show no hysteresis, we find

• film techniques or by an alternative approach, as used by us, namely the direct writing of metal-based layers by focused electron beam induced deposition (FEBID) [18][19]. The resolution of FEBID is better than 10 nm laterally and 1 nm vertically [18][19] and, thus, its proven applications range from

• hard-magnetic behavior for post-processed Co/Pt nano-stripes with coercive fields up to 850 Oe. We attribute the observed effects to the locally controlled formation of the CoPt L10 phase, whose presence has been revealed by transmission electron microscopy. Keywords: cobalt; focused electron beam

Patterning technique for gold nanoparticles on substrates using a focused electron beam

• Takahiro Noriki,
• Shogo Abe,
• Kotaro Kajikawa and
• Masayuki Shimojo

Beilstein J. Nanotechnol. 2015, 6, 1010–1015, doi:10.3762/bjnano.6.104

• structures with gold and silver nanoparticles using a nanomanipulator. This technique is fascinating, but it may be a time-consuming process for production of relatively large circuits. Nanostructures have also been fabricated using focused ion beam- or focused electron beam-induced deposition [1][7

• due to the deposition of amorphous carbon. This amorphous carbon most likely originates from organic molecules around the nanoparticles, as similar mechanisms of decomposition and deposition occur in electron beam-induced deposition (EBID) [9][10][11]. Fujita et al. reported that amorphous carbon was

• formed after the irradiation of phenanthrene molecules adsorbed on a substrate by an electron beam [12]. Amorphous carbon was also formed by electron beam-induced deposition using a ferrocene precursor [13]. In our experiment, no precursor gas was introduced into the SEM chamber, however, the

Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

• Brett B. Lewis,
• Michael G. Stanford,
• Jason D. Fowlkes,
• Kevin Lester,
• Harald Plank and
• Philip D. Rack

Beilstein J. Nanotechnol. 2015, 6, 907–918, doi:10.3762/bjnano.6.94

• , Oak Ridge, TN 37381, USA Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria 10.3762/bjnano.6.94 Abstract Platinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post

• process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention. Keywords: beam induced processing; direct-write; electron beam induced deposition; nano; Introduction Focused electron beam induced deposition (FEBID) is an attractive nanotechnology

Fundamental edge broadening effects during focused electron beam induced nanosynthesis

• Roland Schmied,
• Jason D. Fowlkes,
• Robert Winkler,
• Phillip D. Rack and
• Harald Plank

Beilstein J. Nanotechnol. 2015, 6, 462–471, doi:10.3762/bjnano.6.47

• Tennessee, Knoxville, Tennessee 37996, USA Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria 10.3762/bjnano.6.47 Abstract The present study explores lateral broadening effects of 3D structures fabricated through focused electron beam induced deposition

• more complex proximity effects that significantly reduce lateral edge sharpness and thus should be avoided if desiring high lateral resolution. Keywords: focused electron beam induced deposition; nanofabrication; platinum; simulation; Introduction Focused electron beam induced deposition (FEBID) has

Electron-beam induced deposition and autocatalytic decomposition of Co(CO)₃NO

• Florian Vollnhals,
• Martin Drost,
• Fan Tu,
• Esther Carrasco,
• Andreas Späth,
• Rainer H. Fink,
• Hans-Peter Steinrück and
• Hubertus Marbach

Beilstein J. Nanotechnol. 2014, 5, 1175–1185, doi:10.3762/bjnano.5.129

• Erlangen, Germany 10.3762/bjnano.5.129 Abstract The autocatalytic growth of arbitrarily shaped nanostructures fabricated by electron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) is studied for two precursors: iron pentacarbonyl, Fe(CO)5, and cobalt tricarbonyl

• deposition; nanofabrication; scanning transmission X-ray microscopy; Introduction The fabrication of nanostructures by using focused electron-beam induced processing (FEBIP) techniques, especially electron-beam induced deposition (EBID), has progressed considerably over the last decade [1][2][3][4][5]. In

• observed. In addition, we show that the autocatalytic growth of nanostructures from Co(CO)3NO can also be initiated by an Fe seed layer, which presents a novel approach to the fabrication of layered nanostructures. Keywords: autocatalytic growth; cobalt tricarbonyl nitrosyl; electron-beam induced

Nanoforging – Innovation in three-dimensional processing and shaping of nanoscaled structures

• Andreas Landefeld and
• Joachim Rösler

Beilstein J. Nanotechnol. 2014, 5, 1066–1070, doi:10.3762/bjnano.5.118

• applications of nanoforging. In contrast to structures produced by ion- or electron beam induced deposition, homogenous metallic structures can be manufactured with a high mechanical load capacity. Nanoforging plays out its strength when a small quantity and flexible and individual control of shape is required

In situ growth optimization in focused electron-beam induced deposition

• Paul M. Weirich,
• Marcel Winhold,
• Christian H. Schwalb and
• Michael Huth

Beilstein J. Nanotechnol. 2013, 4, 919–926, doi:10.3762/bjnano.4.103

• nanostructures that are prepared by focused electron-beam-induced deposition (FEBID). It allows us to tune the properties of the deposits towards the highest conductivity by using the time gradient of the measured in situ rate of change of conductance as the fitness parameter for the algorithm. The effectiveness

• largely suppressed. The presented technique can be applied to all beam-induced deposition processes and has great potential for a further optimization or tuning of parameters for nanostructures that are prepared by FEBID or related techniques. Keywords: electron beam induced deposition; genetic algorithm

• ; nanotechnology; tungsten; Introduction In focused electron-beam-induced deposition, FEBID in short, a (metal-)organic or inorganic volatile precursor gas, which was previously adsorbed on a substrate surface, is dissociated in the focus of an electron beam provided by a scanning (SEM) or transmission electron

Simulation of electron transport during electron-beam-induced deposition of nanostructures

• Francesc Salvat-Pujol,
• Harald O. Jeschke and
• Roser Valentí

Beilstein J. Nanotechnol. 2013, 4, 781–792, doi:10.3762/bjnano.4.89

• that addresses the multi-scale nature of the electron-beam-induced deposition (EBID) process. Furthermore, similar simulations can help to understand the role that is played by backscattered electrons and emitted secondary electrons in the change of structural properties of nanostructured materials

• during post-growth electron-beam treatments. Keywords: electron backscattering; electron transport; (F)EBID; Monte Carlo simulation; PENELOPE; Introduction Electron-beam-induced deposition (EBID) [1][2][3] is a suitable method for the template-free fabrication of nanostructures. Molecules of a

The role of electron-stimulated desorption in focused electron beam induced deposition

• Willem F. van Dorp,
• Thomas W. Hansen,
• Jakob B. Wagner and
• Jeff T. M. De Hosson

Beilstein J. Nanotechnol. 2013, 4, 474–480, doi:10.3762/bjnano.4.56

• exposed to the electron beam. If these fragments react with the target material to form a gaseous product, the target is etched locally (focused electron beam induced etching). If on the other hand the fragments form a residue, a deposit grows on the sample surface (focused electron beam induced

• deposition). In either case, the sample can be modified directly with the electron beam, in principle without the use of any extra processing before or after the electron exposure. FEBIP is applied in various fields. Because electrons can be focused into narrow beams, small patterns can be defined with FEBIP

Low-dose patterning of platinum nanoclusters on carbon nanotubes by focused-electron-beam-induced deposition as studied by TEM

• Xiaoxing Ke,
• Carla Bittencourt,
• Sara Bals and
• Gustaaf Van Tendeloo

Beilstein J. Nanotechnol. 2013, 4, 77–86, doi:10.3762/bjnano.4.9

• desired. In this paper, we explore the use of focused-electron-beam-induced deposition (FEBID) to pattern CNTs with well-dispersed ultrasmall nanoclusters. FEBID is a direct-write process where a focused electron beam is used to locally decompose a precursor gas that contains a component such as a metal

• Xiaoxing Ke Carla Bittencourt Sara Bals Gustaaf Van Tendeloo EMAT, University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium Chemistry of Interaction Plasma Surface (ChiPS), University of Mons, Place du Parc 20, 7000 Mons, Belgium 10.3762/bjnano.4.9 Abstract Focused-electron-beam

• -induced deposition (FEBID) is used as a direct-write approach to decorate ultrasmall Pt nanoclusters on carbon nanotubes at selected sites in a straightforward maskless manner. The as-deposited nanostructures are studied by transmission electron microscopy (TEM) in 2D and 3D, demonstrating that the Pt

Focused electron beam induced deposition: A perspective

• Michael Huth,
• Fabrizio Porrati,
• Christian Schwalb,
• Marcel Winhold,
• Roland Sachser,
• Maja Dukic,
• Jonathan Adams and
• Georg Fantner

Beilstein J. Nanotechnol. 2012, 3, 597–619, doi:10.3762/bjnano.3.70

• ), Station 17, CH-1015 Lausanne, Switzerland 10.3762/bjnano.3.70 Abstract Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on

• the field of focused electron beam induced deposition. Keywords: atomic force microscopy; binary systems; electron beam induced deposition; granular metals; micro Hall magnetometry; radiation-induced nanostructures; strain sensing; Review Introduction Focused electron beam induced deposition (FEBID

Spontaneous dissociation of Co₂(CO)₈ and autocatalytic growth of Co on SiO₂: A combined experimental and theoretical investigation

• Kaliappan Muthukumar,
• Harald O. Jeschke,
• Roser Valentí,
• Evgeniya Begun,
• Johannes Schwenk,
• Fabrizio Porrati and
• Michael Huth

Beilstein J. Nanotechnol. 2012, 3, 546–555, doi:10.3762/bjnano.3.63

• dissociation of the precursor molecule. In view of these calculations, we discuss the origin of this dissociation and the subsequent autocatalysis. Keywords: Co2(CO)8; deposition; dissociation; EBID; FEBID; precursor; radiation-induced nanostructures; Introduction In recent years, focused electron beam

• induced deposition (FEBID) has emerged as a versatile, high-resolution technique for nanostructure fabrication in contrast to the more conventional nanolithographic techniques. In FEBID, a previously adsorbed precursor gas is dissociated in the focus of an electron beam. The nonvolatile part of the

Radiation-induced nanostructures: Formation processes and applications

• Michael Huth

Beilstein J. Nanotechnol. 2012, 3, 533–534, doi:10.3762/bjnano.3.61

• –liquid–solid approach and the preparation of monolayers of metal–organic frameworks attached to the functional groups of a self-assembled monolayer (see, e.g., [1][2][3][4]). Not as wide-spread, but rapidly developing, is the technique of focused electron beam induced deposition (FEBID) [5]. In this