Charged particle single nanometre manufacturing

• Philip D. Prewett,
• Cornelis W. Hagen,
• Claudia Lenk,
• Steve Lenk,
• Marcus Kaestner,
• Tzvetan Ivanov,
• Ahmad Ahmad,
• Ivo W. Rangelow,
• Xiaoqing Shi,
• Stuart A. Boden,
• Alex P. G. Robinson,
• Dongxu Yang,
• Sangeetha Hari,
• Marijke Scotuzzi and
• Ejaz Huq

Beilstein J. Nanotechnol. 2018, 9, 2855–2882, doi:10.3762/bjnano.9.266

• EBID for reliable nanofabrication has required several issues to be addressed, such as different kinds of proximity effects [58][59] leading to deposit broadening while patterning dense lines and dots, variation of deposit morphology as a function of the beam current and precursor flux [60], and the

Nanostructure-induced performance degradation of WO₃·nH₂O for energy conversion and storage devices

• Zhenyin Hai,
• Mohammad Karbalaei Akbari,
• Zihan Wei,
• Danfeng Cui,
• Chenyang Xue,
• Hongyan Xu,
• Philippe M. Heynderickx,
• Francis Verpoort and
• Serge Zhuiykov

Beilstein J. Nanotechnol. 2018, 9, 2845–2854, doi:10.3762/bjnano.9.265

• : Coloration/bleaching during electrochemical cycling. Acknowledgements The work was supported by the Research and Development Program of the Ghent University Global Campus, South Korea. This work was supported in part by the Melbourne Centre for Nanofabrication (MCN) in the Victoria Node of the Australian

Low cost tips for tip-enhanced Raman spectroscopy fabricated by two-step electrochemical etching of 125 µm diameter gold wires

• Antonino Foti,
• Francesco Barreca,
• Enza Fazio,
• Cristiano D’Andrea,
• Paolo Matteini,
• Onofrio Maria Maragò and
• Pietro Giuseppe Gucciardi

Beilstein J. Nanotechnol. 2018, 9, 2718–2729, doi:10.3762/bjnano.9.254

• intrinsically scalable and tips of any kind of material can be used, but the reproducibility is low and the field enhancement is not excellent. Nanofabrication methods guarantee optimal control of the dimensions and reproducibility, but they are serial techniques, i.e., slow, and fabrication costs are high. In

Silencing the second harmonic generation from plasmonic nanodimers: A comprehensive discussion

• Jérémy Butet,
• Gabriel D. Bernasconi and
• Olivier J. F. Martin

Beilstein J. Nanotechnol. 2018, 9, 2674–2683, doi:10.3762/bjnano.9.250

• ]. Indeed, although important progress has been made in nanofabrication, it still impossible to fabricate nanostructures of perfect shape and, for real experiments, one must consider the influence of shape variations of the nanostructures on SHG. This issue has been thoroughly considered in the case of SHG

• , the case of gold dimers made of rectangular arms is considered, Figure 7a. The purpose is to show that the observations made for cylindrical nanorods still stand for other geometries. Both geometries can be obtained with specific nanofabrication techniques. While cylindrical nanorods would be the

Two-dimensional semiconductors pave the way towards dopant-based quantum computing

• José Carlos Abadillo-Uriel,
• Belita Koiller and
• María José Calderón

Beilstein J. Nanotechnol. 2018, 9, 2668–2673, doi:10.3762/bjnano.9.249

• 21941-972, Brazil 10.3762/bjnano.9.249 Abstract Since the proposal in 1998 to build a quantum computer using dopants in silicon as qubits, much progress has been made in the nanofabrication of semiconductors and the control of charge and spins in single dopants. However, an important problem remains

Polarization-dependent strong coupling between silver nanorods and photochromic molecules

• Gwénaëlle Lamri,
• Alessandro Veltri,
• Jean Aubard,
• Pierre-Michel Adam,
• Nordin Felidj and
• Anne-Laure Baudrion

Beilstein J. Nanotechnol. 2018, 9, 2657–2664, doi:10.3762/bjnano.9.247

• large number of metallic nanoparticles and molecules respectively. Indeed, the nanofabrication process does not allow us to obtain identical geometries over this large number of particles, especially for this nanorod geometry where a rounding of the corners occurs. The extinction measurements do not

• parameters of the nanorods, mainly width and length, correspond to the designed values. Indeed, only few images have been recorded by electronic microscopy after the nanofabrication process and small variations between the designed and the real sizes can occur. To confirm the observation of a strong coupling

Enhancement of X-ray emission from nanocolloidal gold suspensions under double-pulse excitation

• Wei-Hung Hsu,
• Frances Camille P. Masim,
• Armandas Balčytis,
• Hsin-Hui Huang,
• Tetsu Yonezawa,
• Aleksandr A. Kuchmizhak,
• Saulius Juodkazis and
• Koji Hatanaka

Beilstein J. Nanotechnol. 2018, 9, 2609–2617, doi:10.3762/bjnano.9.242

• Branch, Russian Academy of Science, Vladivostok 690041, Russia Melbourne Centre for Nanofabrication, the Victorian Node of the Australian National Fabrication Facility, Clayton 3168 VIC, Australia College of Engineering, Chang Gung University , Guishan, Taoyuan 33302, Taiwan Department of Materials

Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

• Lukas Keller and
• Michael Huth

Beilstein J. Nanotechnol. 2018, 9, 2581–2598, doi:10.3762/bjnano.9.240

• different precursors are presented that validate the effectiveness of the implementation. Keywords: focused electron beam induced deposition; nanofabrication; three-dimensional nanostructures; 1 Introduction New physical effects and functionalities can arise when the third dimension can be accessed at the

• into account in order to deposit well-defined 3D structures that are in satisfying agreement with the originally targeted geometry. Fowlkes and collaborators have demonstrated the potential of a simulation-guided and computer-aided design (CAD)-based approach to 3D nanofabrication via FEBID [24], which

Metal–dielectric hybrid nanoantennas for efficient frequency conversion at the anapole mode

• Valerio F. Gili,
• Lavinia Ghirardini,
• Davide Rocco,
• Giuseppe Marino,
• Ivan Favero,
• Iännis Roland,
• Giovanni Pellegrini,
• Lamberto Duò,
• Marco Finazzi,
• Luca Carletti,
• Andrea Locatelli,
• Aristide Lemaître,
• Dragomir Neshev,
• Costantino De Angelis,
• Giuseppe Leo and
• Michele Celebrano

Beilstein J. Nanotechnol. 2018, 9, 2306–2314, doi:10.3762/bjnano.9.215

• have already been achieved in integrated nonlinear optics [24], including SHG in quasi-phase-matched waveguides [25], efficient frequency-comb generation [25], and optical parametric oscillation [26]. Only very recently, thanks to the dramatic improvement of nanofabrication techniques, the integration

Optimization of the optical coupling in nanowire-based integrated photonic platforms by FDTD simulation

• Nan Guan,
• Andrey Babichev,
• Martin Foldyna,
• Dmitry Denisov,
• François H. Julien and
• Maria Tchernycheva

Beilstein J. Nanotechnol. 2018, 9, 2248–2254, doi:10.3762/bjnano.9.209

• width. For NW devices with a 1 µm diameter, the optimized efficiency is reached for a 1.49 µm wide waveguide. All of the parameters are within reach of current nanofabrication capabilities. Therefore, the optimized photonic platform with a high light coupling efficiency could be implemented. This light

Electromigrated electrical optical antennas for transducing electrons and photons at the nanoscale

• Arindam Dasgupta,
• Mickaël Buret,
• Nicolas Cazier,
• Marie-Maxime Mennemanteuil,
• Reinaldo Chacon,
• Kamal Hammani,
• Jean-Claude Weeber,
• Juan Arocas,
• Laurent Markey,
• Gérard Colas des Francs,
• Alexander Uskov,
• Igor Smetanin and
• Alexandre Bouhelier

Beilstein J. Nanotechnol. 2018, 9, 1964–1976, doi:10.3762/bjnano.9.187

• for producing these functional units based upon the electromigration of metal constrictions. Results: We combine multiple nanofabrication steps to realize in-plane tunneling junctions made of two gold electrodes, separated by a sub-nanometer gap acting as the feedgap of an optical antenna. We

• tunneling transport. We demonstrate light generation from the feedgap and discuss different emission mechanisms based on the radiated spectrum and activation voltage. Results and Discussion Nanofabrication of electrically connected optical antennas The starting geometry for realizing an electrically

Interaction-tailored organization of large-area colloidal assemblies

• Silvia Rizzato,
• Elisabetta Primiceri,
• Anna Grazia Monteduro,
• Adriano Colombelli,
• Angelo Leo,
• Maria Grazia Manera,
• Roberto Rella and
• Giuseppe Maruccio

Beilstein J. Nanotechnol. 2018, 9, 1582–1593, doi:10.3762/bjnano.9.150

• size, shape and distribution control. However, these processes have high cost and low speed and these limitations encourage the development of alternative methods for parallel nanofabrication. Among them, colloidal lithography is emerging as an innovative strategy for fast and inexpensive realization

Cathodoluminescence as a probe of the optical properties of resonant apertures in a metallic film

• Kalpana Singh,
• Evgeniy Panchenko,
• Babak Nasr,
• Amelia Liu,
• Lukas Wesemann,
• Timothy J. Davis and
• Ann Roberts

Beilstein J. Nanotechnol. 2018, 9, 1491–1500, doi:10.3762/bjnano.9.140

• : Additional figures. Background material relating to the modes of rod and aperture ensembles. Acknowledgements This work was performed in part at the Melbourne Centre for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF). The authors acknowledge the financial

Chemistry for electron-induced nanofabrication

• Petra Swiderek,
• Hubertus Marbach and
• Cornelis W. Hagen

Beilstein J. Nanotechnol. 2018, 9, 1317–1320, doi:10.3762/bjnano.9.124

• -Alexander-Universität Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen, Germany, Department of Imaging Physics, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands 10.3762/bjnano.9.124 Keywords: electron-induced chemistry, FEBID; FEBIP; nanofabrication; nanolithography; Electron

• technique for nanofabrication capable of producing structures that range from 0D dots with a diameter of less than 1 nm [3] to arbitrarily shaped free-standing 3D structures with sub-10 nm size [1][2] or fascinating complexity [4][5]. These structures can serve as devices that give access to a wealth of new

• in the FEBID process. All these factors govern the deposit purity, spatial resolution, and processing speed. The European COST Action CELINA (Chemistry for ELectron-Induced NAnofabrication [9]) has, from 2013 to 2017, stimulated multidisciplinary and multinational collaborative research that aims at

Field-controlled ultrafast magnetization dynamics in two-dimensional nanoscale ferromagnetic antidot arrays

• Anulekha De,
• Sucheta Mondal,
• Sourav Sahoo,
• Saswati Barman,
• Yoshichika Otani,
• Rajib Kumar Mitra and
• Anjan Barman

Beilstein J. Nanotechnol. 2018, 9, 1123–1134, doi:10.3762/bjnano.9.104

• triangular holes in future magnonic and spintronic devices. Keywords: ferromagnetic antidot lattice; magnonic crystal; micromagnetic simulations; spin-wave modes; time-resolved magneto-optical Kerr effect; Introduction Recent advances in nanofabrication techniques have resulted in artificially patterned

Magnetic characterization of cobalt nanowires and square nanorings fabricated by focused electron beam induced deposition

• Federico Venturi,
• Gian Carlo Gazzadi,
• Amir H. Tavabi,
• Alberto Rota,
• Rafal E. Dunin-Borkowski and
• Stefano Frabboni

Beilstein J. Nanotechnol. 2018, 9, 1040–1049, doi:10.3762/bjnano.9.97

• at remanence using L-TEM and MFM. Our results confirm the suitability of FEBID for nanofabrication of magnetic structures and demonstrate the versatility of TEM techniques for the study and manipulation of magnetic domain walls in nanostructures. Keywords: focused electron beam induced deposition

Wafer-scale bioactive substrate patterning by chemical lift-off lithography

• Chong-You Chen,
• Chang-Ming Wang,
• Hsiang-Hua Li,
• Hong-Hseng Chan and
• Wei-Ssu Liao

Beilstein J. Nanotechnol. 2018, 9, 311–320, doi:10.3762/bjnano.9.31

• versatile applications in chemistry, biology, biophysics, and bioengineering [1][2][3][4]. In order to achieve the feature size and procedure convenience requirements that satisfy the specific needs for different applications, the adaptation of appropriate micro/nanofabrication approaches is necessary. The

Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions

• Liga Jasulaneca,
• Jelena Kosmaca,
• Raimonds Meija,
• Jana Andzane and
• Donats Erts

Beilstein J. Nanotechnol. 2018, 9, 271–300, doi:10.3762/bjnano.9.29

Design of photonic microcavities in hexagonal boron nitride

• Sejeong Kim,
• Milos Toth and
• Igor Aharonovich

Beilstein J. Nanotechnol. 2018, 9, 102–108, doi:10.3762/bjnano.9.12

• ]. The former process is preferred when attempting to maximize the field overlap between the emitters and the cavity modes, and is often employed when using materials that are amenable to scalable nanofabrication protocols, such as gallium arsenide or silicon [17][18], and more recently diamond and

Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits

• Fan Tu,
• Martin Drost,
• Imre Szenti,
• Janos Kiss,
• Zoltan Kónya and
• Hubertus Marbach

Beilstein J. Nanotechnol. 2017, 8, 2592–2605, doi:10.3762/bjnano.8.260

• ; electron beam induced deposition; focused electron beam induced processing; iron pentacarbonyl; nanofabrication; Introduction Carbon nanotubes (CNTs) have attracted enormous interest due to their potential as functional building blocks in applications such as molecular electronics, sensors and energy

Refractive index sensing and surface-enhanced Raman spectroscopy using silver–gold layered bimetallic plasmonic crystals

• Somi Kang,
• Sean E. Lehman,
• Matthew V. Schulmerich,
• An-Phong Le,
• Tae-woo Lee,
• Stephen K. Gray,
• Rohit Bhargava and
• Ralph G. Nuzzo

Beilstein J. Nanotechnol. 2017, 8, 2492–2503, doi:10.3762/bjnano.8.249

• Energy Frontier Research Center on Light-Material Interactions in Energy Conversion and was performed using resources at the Frederick Seitz Materials Research Laboratory Central Facilities at the University of Illinois, including the Center for Microanalysis of Materials; the Micro/Nanofabrication

Au nanostructure fabrication by pulsed laser deposition in open air: Influence of the deposition geometry

• Rumen G. Nikov,
• Anna Og. Dikovska,
• Nikolay N. Nedyalkov,
• Georgi V. Avdeev and
• Petar A. Atanasov

Beilstein J. Nanotechnol. 2017, 8, 2438–2445, doi:10.3762/bjnano.8.242

• properties [1][2], which are not observed in their bulk counterparts. Moreover, the strong dependence of the physical and chemical properties of these structures on their surface morphology makes them very attractive for a wide range of applications [3][4][5][6][7][8][9]. Initially, the nanofabrication

• the development of inexpensive, easy-to-use, flexible and time-saving nanofabrication techniques. The efforts of the other scientific groups have been directed to producing nanostructures for applications in areas such as nanomedicine that impose specific requirements regarding the technology behind

• their fabrication. Such applications require contamination-free nanostructures, suggesting that the development and use of physical nanofabrication methods is further warranted. One of the physical vapor deposition techniques widely applied in bottom-up nanotechnology is pulsed laser deposition (PLD

Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition

• Julie A. Spencer,
• Michael Barclay,
• Miranda J. Gallagher,
• Robert Winkler,
• Ilyas Unlu,
• Yung-Chien Wu,
• Harald Plank,
• Lisa McElwee-White and
• D. Howard Fairbrother

Beilstein J. Nanotechnol. 2017, 8, 2410–2424, doi:10.3762/bjnano.8.240

• nanostructures to be fabricated. Despite the significant advantages of a process that can direct write nanostructures without the need for resists or masks [2][3], FEBID has several challenges preventing its wider implementation as a robust method for nanofabrication. One of the biggest issues is deposit purity

Increasing the stability of DNA nanostructure templates by atomic layer deposition of Al₂O₃ and its application in imprinting lithography

• Hyojeong Kim,
• Kristin Arbutina,
• Anqin Xu and
• Haitao Liu

Beilstein J. Nanotechnol. 2017, 8, 2363–2375, doi:10.3762/bjnano.8.236

• resistive to UV/O3 oxidation. The ALD-coated DNA templates were used for a direct pattern transfer to poly(L-lactic acid) films. Keywords: aluminium oxide (Al2O3); atomic layer deposition; DNA nanostructure; nanofabrication; nanoimprint lithography; pattern transfer; polymer stamp; replica molding

• complex features. Therefore, self-assembled DNA nanostructures are considered to be an ideal template for nanofabrication because it is easy to control their structural complexity and diversity at the nanoscale. Many approaches have been developed to use DNA nanostructures as templates to pattern a wide

• system by Norman Gottron in Nanofabrication Facility at Carnegie Mellon University (Ultratech/CNT, Waltham, MA, USA). Chamber and substrate heaters were set to 200 °C. Total Ar gas flow was at 260 sccm and 200 mTorr. Trimethylaluminum (TMA) and H2O were used as precursors and one ALD cycle consisted of a

Suppression of low-energy dissociative electron attachment in Fe(CO)₅ upon clustering

• Jozef Lengyel,
• Peter Papp,
• Štefan Matejčík,
• Jaroslav Kočišek,
• Michal Fárník and
• Juraj Fedor

Beilstein J. Nanotechnol. 2017, 8, 2200–2207, doi:10.3762/bjnano.8.219

• electron attachment in isolated Fe(CO)5. Keywords: aggregation effects; dissociative electron attachment; FEBID; iron pentacarbonyl; long-range interactions; Introduction In recent years a number of gas-phase studies on molecules that are commonly used as precursors in electron-induced nanofabrication