Focused ion beam-induced platinum deposition with a low-temperature cesium ion source

• Thomas Henning Loeber,
• Bert Laegel,
• Meltem Sezen,
• Feray Bakan Misirlioglu,
• Edgar J. D. Vredenbregt and
• Yang Li

Beilstein J. Nanotechnol. 2025, 16, 910–920, doi:10.3762/bjnano.16.69

• surface is a frequently used process of focused ion beam (FIB) systems. Here, we report on the deposition of platinum (Pt) with a new kind of cesium (Cs) FIB, in which the cesium ions are produced by a low-temperature ion source. Platinum was deposited at different acceleration voltages and ion beam

• conditions, but the deposit has lower Pt content for Cs+. The electrical resistivity of the deposit is found to be higher for Cs+ than for Ga+ and decreasing with increasing acceleration voltage. Keywords: cesium ion source; cold atom ion source; focused ion beam (FIB); FIB-induced deposition (FIBID

• are more advanced with respect to source development because of their relatively low requirements regarding the cooling laser. Milling [10] as well as induced deposition of platinum (Pt) [11] and tungsten (W) [12] have been studied for a prototype FIB with an ultracold Rb+source. Further, a Cs+ laser

Insights into the electronic and atomic structures of cerium oxide-based ultrathin films and nanostructures using high-brilliance light sources

• Paola Luches and
• Federico Boscherini

Beilstein J. Nanotechnol. 2025, 16, 860–871, doi:10.3762/bjnano.16.65

• was possible to identify different types of interactions between Pt NPs and cerium oxide surfaces including electron transfer from Pt NPs to CeO2 and transport of oxygen atoms from ceria to Pt NPs, the latter occurring only when the ceria support surface is nanostructured [26]. In addition, thanks to

• its sensitivity, the method, when combined with other techniques, has provided quantitative information on the number of electrons transferred per particle to the support (Figure 2), enabling the optimization of the size of the supported active Pt catalyst [27]. This is a crucial factor in minimizing

• minimum of the inelastic mean free path. A study by Simon et al. on porous Pt-doped cerium oxide films prepared by direct liquid injection chemical vapor deposition, comparing conventional and synchrotron-radiation based XPS, has demonstrated that the Pt atoms are uniformly dispersed in the nanoparticles

Synchrotron X-ray photoelectron spectroscopy study of sodium adsorption on vertically arranged MoS₂ layers coated with pyrolytic carbon

• Alexander V. Okotrub,
• Anastasiya D. Fedorenko,
• Anna A. Makarova,
• Veronica S. Sulyaeva,
• Yuliya V. Fedoseeva and
• Lyubov G. Bulusheva

Beilstein J. Nanotechnol. 2025, 16, 847–859, doi:10.3762/bjnano.16.64

• molybdenum layer sputtered for 90 s. Part of the film surface was covered with a protective Pt layer and a lamella was cut using a focused ion beam (FIB) system (see the Experimental section for details). Figure 1d shows the SEM image of the cross section of the lamella. The bright round spots on the film

• surface correspond to Pt nanoparticles, the presence of which is confirmed by energy-dispersive X-ray (EDX) spectroscopy (Supporting Information File 1, Figure S1). These nanoparticles have a uniform size and are densely distributed on the sample surface, in contrast to the polysulfide particles of

• deposition. Initially, a Pt layer of 21 nm was electrodeposited at 5 keV and 1 nA. After that, a thick Pt cap layer was ion-plated at 30 keV and 250 pA. Then, the FIB was operated at an ion accelerating voltage of 30 keV and ion current of 20 nA to cut the sample. Finally, the section was finely polished at

Facile one-step radio frequency magnetron sputtering of Ni/NiO on stainless steel for an efficient electrode for hydrogen evolution reaction

• Ha Huu Do,
• Khac Binh Nguyen,
• Phuong N. Nguyen and
• Hoai Phuong Pham

Beilstein J. Nanotechnol. 2025, 16, 837–846, doi:10.3762/bjnano.16.63

• electrocatalysts have been well accepted as potential candidates to replace Pt-based electrocatalysts for HER because of their suitable Gibbs free hydrogen adsorption energy, good intrinsic catalytic properties, and high stability. However, solution-based synthetic approaches can be highly harmful to human beings

• efficiency compared to gasoline, coal, and natural gas. Currently, hydrogen produced by water electrolysis is well accepted as an ecologically clean, sustainable method compared to other techniques, such as coal gasification and steam methane reforming [5][6][7][8][9][10]. According to reported works, Pt

• catalysts were recognized as the best material for electrochemical hydrogen evolution reaction (HER) [11][12][13]. However, it is challenging to use Pt-based nanomaterials for industrial applications because of their non-abundance and high cost. As a result, many studies have explored Pt-free catalysts

Supramolecular hydration structure of graphene-based hydrogels: density functional theory, green chemistry and interface application

• Hon Nhien Le,
• Duy Khanh Nguyen,
• Minh Triet Dang,
• Huyen Trinh Nguyen,
• Thi Bang Tam Dao,
• Trung Do Nguyen,
• Chi Nhan Ha Thuc and
• Van Hieu Le

Beilstein J. Nanotechnol. 2025, 16, 806–822, doi:10.3762/bjnano.16.61

• microscopy and energy-dispersive X-ray spectroscopy were performed using a JSM-IT200 system (JEOL). Samples were coated with Pt before the SEM-EDS analysis. X-ray diffraction was performed on a D8 Advance instrument (Bruker). Fourier-transform infrared spectroscopy (FTIR) was characterized with a FT/IR-6600

Thickness dependent oxidation in CrCl₃: a scanning X-ray photoemission and Kelvin probe microscopies study

• Shafaq Kazim,
• Rahul Parmar,
• Maryam Azizinia,
• Matteo Amati,
• Muhammad Rauf,
• Andrea Di Cicco,
• Seyed Javid Rezvani,
• Dario Mastrippolito,
• Luca Ottaviano,
• Tomasz Klimczuk,
• Luca Gregoratti and
• Roberto Gunnella

Beilstein J. Nanotechnol. 2025, 16, 749–761, doi:10.3762/bjnano.16.58

• values of L and T flakes are 0.10 and 0.04 V, respectively. Based on these values, the work functions of L and T flakes are about 5.40 and 5.46 eV, respectively, given the work function of the Pt tip of 5.50 eV. As a control, the work function of SiO2 was measured correctly as 5.00 eV. To complete the

• cantilever coated with Pt at the resonance frequency of 68 kHz with an elastic constant of 1–5 N/m (AppNano) and doped diamond tips with 120 kHz and 8 N/m elastic constant (ADAMA). Kelvin probe force microscopy images were taken via double passage before and after applying an electric field by elevating the

• SiO2/Si substrate. (a) Topography from non-contact mode AFM of two flakes with different thicknesses; (b) Kelvin surface potential of the samples on SiO2; (c) z-profiles of the two flakes; (d) Kelvin surface potential scans along the profiles of (a). A Pt-coated tip was used. (a)Topography from non

Nanoscale capacitance spectroscopy based on multifrequency electrostatic force microscopy

• Pascal N. Rohrbeck,
• Lukas D. Cavar,
• Franjo Weber,
• Peter G. Reichel,
• Mara Niebling and
• Stefan A. L. Weber

Beilstein J. Nanotechnol. 2025, 16, 637–651, doi:10.3762/bjnano.16.49

• nanospectroscopy experiments. The microcapacitors were produced by focused ion beam (FIB) milling on a silicon wafer with a 300 nm layer of SiO2 and a 14 nm sputtered layer of Pt on it (Figure 2). Results and Discussion To investigate whether the C″-sensitive detection leads to an improved spatial resolution of

• together with the parameters of a regular EFM cantilever (NuNano SPARK 70 Pt) and an electrical drive of V = 2 V and a mechanical amplitude of Am = 10 nm. Comparing the graphs, we can immediately see that the total C′ signal retains a significant long-range contribution even at a tip–sample separation of

• of 1.5–4.0 Ωcm, and with p-type doping with B atoms. These wafers were thermally oxidized with 300 nm SiO2. A compact coating unit 010/LV with the sputter head SP010 was used to sputter 14 nm of Pt on top of the wafer. The microcapacitors were then milled out of the surface using a FEI Nova600

Focused ion and electron beams for synthesis and characterization of nanomaterials

• Aleksandra Szkudlarek

Beilstein J. Nanotechnol. 2025, 16, 613–616, doi:10.3762/bjnano.16.47

• the substrate. Metallic structures can be fabricated directly or through post-purification methods, such as water-assisted treatment, which has been effective for Au and Pt deposits [10]. Interestingly, morphological changes in the underlying SiO2 layer were observed during the process, resembling

• focused electron beam-induced etching (FEBIE), can effectively control edge profiles, supported by continuum modeling [12]. Additionally, using alternative precursors such as Pt(CO)2Cl2 and Pt(CO)2Br2 with low-energy ion irradiation enables the fabrication of high-purity Pt deposits. This process involves

• ion beam interactions [15]. In addition, the extension of the continuum model has proven useful in predicting the outcomes of ion beam milling processes in multilayered systems, as demonstrated in the case of the Si/SiO2/Pt system [16]. To identify the current state of the technology and routes

Retrieval of B1 phase from high-pressure B2 phase for CdO nanoparticles by electronic excitations in Cd_xZn_1−xO composite thin films

• Arkaprava Das,
• Marcin Zając and
• Carla Bittencourt

Beilstein J. Nanotechnol. 2025, 16, 551–560, doi:10.3762/bjnano.16.43

• , we reported a local pressure-driven structural phase transformation (PT) from B1 (NaCl) to B2 (CsCl) in CdxZn1−xO (x = 0.4) composite binary oxide thin films [1]. The radiation stability of these phases is crucial for optoelectronic applications in space, where the exposure to high-energy particles

• the B1 to B2 PT in CdxZn1−xO (x = 0.4) binary oxide thin films subjected to various annealing temperatures of 700, 800, 850, and 900 °C [1]. The data reveals the emergence of the B2 phase characterized by the (100) Bragg reflection in CdO nanoparticles as the annealing temperature increases. In

• contrast, the ZnO nanoparticles consistently exhibit the hexagonal wurtzite phase. Figure 1b portrays the effect of 80 MeV O and 120 MeV Ag ion irradiation on the CZ900_Pris sample, wherein the complete transition from B1 to B2 PT has already occurred. The reflections corresponding to the hexagonal

Functionalized gold nanoflowers on carbon screen-printed electrodes: an electrochemical platform for biosensing hemagglutinin protein of influenza A H1N1 virus

• Carlos Enrique Torres-Méndez,
• Sharmilee Nandi,
• Klara Martinovic,
• Patrizia Kühne,
• Yifan Liu,
• Sam Taylor,
• Maria Lysandrou,
• Maria Ines Berrojo Romeyro Mascarenhas,
• Viktoria Langwallner,
• Javier Enrique Sebastián Alonso,
• Ivana Jovanovic,
• Maike Lüftner,
• Georgia-Vasiliki Gkountana,
• David Bern,
• Abdul-Raouf Atif,
• Ehsan Manouchehri Doulabi,
• Gemma Mestres and
• Masood Kamali-Moghaddam

Beilstein J. Nanotechnol. 2025, 16, 540–550, doi:10.3762/bjnano.16.42

• , the existence of this effect in a material appears to depend on the size of the superficial nanostructures. A similar effect has been reported for 4-ATP-functionalized multilayered nanostructures of Ag, Au, and Pt with a size range between 48 and 130 nm [36][37] as well as for 4-ATP-functionalized

Effect of additives on the synthesis efficiency of nanoparticles by laser-induced reduction

• Rikuto Kuroda,
• Takahiro Nakamura,
• Hideki Ina and
• Shuhei Shibata

Beilstein J. Nanotechnol. 2025, 16, 464–472, doi:10.3762/bjnano.16.35

• Au–Pt alloy (atomic ratio, Au/Pt = 1:1) that has an immiscible gap in the binary phase diagram and is difficult to form a solid–solution alloy in a bulk form. Figure 6 shows a a) TEM image and b) STEM-EDS mappings of the particles produced after laser irradiation. The TEM results (Figure 6a

• ) confirmed the formation of nanoparticles with a diameter of less than 20 nm. The STEM-EDS mappings (Figure 6b) clearly showed that Au and Pt were uniformly present within each particle, and the atomic ratio was Au/Pt = 1:1, which was consistent with the mixing ratio of the precursor ions. Namely, it was

• spectrum after 30 min of laser irradiation in aqueous solutions of tetra chloroauric acid with various concentrations. a) Without glycerin, b) with glycerin. a) A TEM image, b) a high-angle annular dark-field (HAADF) image and STEM-EDS mappings of Au–Pt alloy nanoparticles (atomic ratio Au/Pt = 1:1

Quantification of lead through rod-shaped silver-doped zinc oxide nanoparticles using an electrochemical approach

• Ravinder Lamba,
• Gaurav Bhanjana,
• Neeraj Dilbaghi,
• Vivek Gupta and
• Sandeep Kumar

Beilstein J. Nanotechnol. 2025, 16, 422–434, doi:10.3762/bjnano.16.33

• voltammetry. This evaluation involved the usage of a three-electrode system and a gold electrode modified with Ag–ZnO nanorods. The modified electrode was used as a working electrode in the three-electrode system, while the reference electrode was made of Ag/AgCl (sat. KCl), and the Pt electrode was used as a

Size control of nanoparticles synthesized by pulsed laser ablation in liquids using donut-shaped beams

• Abdel Rahman Altakroury,
• Oleksandr Gatsa,
• Farbod Riahi,
• Zongwen Fu,
• Miroslava Flimelová,
• Andrei Samokhvalov,
• Stephan Barcikowski,
• Carlos Doñate-Buendía,
• Alexander V. Bulgakov and
• Bilal Gökce

Beilstein J. Nanotechnol. 2025, 16, 407–417, doi:10.3762/bjnano.16.31

• most elegant, surfactant-free size quenching method by micromolar anion addition only works for soft Lewis-acid nanoparticle materials, in particular, Au, Pt, and Pd, as the process is driven by anion adsorption Hofmeister effects, but not for oxide or multi-base metal materials such as the Cantor

ReactorAFM/STM – dynamic reactions on surfaces at elevated temperature and atmospheric pressure

• Tycho Roorda,
• Hamed Achour,
• Matthijs A. van Spronsen,
• Marta E. Cañas-Ventura,
• Sander B. Roobol,
• Willem Onderwaater,
• Mirthe Bergman,
• Peter van der Tuijn,
• Gertjan van Baarle,
• Johan W. Bakker,
• Joost W. M. Frenken and
• Irene M. N. Groot

Beilstein J. Nanotechnol. 2025, 16, 397–406, doi:10.3762/bjnano.16.30

• serves as a protection against the high-pressure gases, as well as a shield from high piezovoltages. The scanner range can go up to 3.6 μm × 3.6 μm and does not have a coarse range in the x and y directions. Tip preparation Tips are fabricated by electrochemical etching of a 25 μm Pt/Ir wire immersed in

• a CaCl2 electrolytic solution (CaCl2 5 g, H2O 30 mL, acetone 2 mL). An alternating current (AC) voltage (50 Hz, 1–10 V) is applied between the tip and a gold ring electrode with the etching solution in suspension resulting in a sharp tip, which serves as the probe. In a second step, the etched Pt/Ir

• tip displacement and vibration modes that might occur for tip heights longer than 400 μm [22]. A Pt/Ir tip is chosen such that it does not oxidize in reaction conditions. Electronics and data acquisition The tunneling current is collected using a preamplifier (DLPCA-200 preamp, Femto Messtechnik GmbH

Pulsed laser in liquid grafting of gold nanoparticle–carbon support composites

• Madeleine K. Wilsey,
• Teona Taseska,
• Qishen Lyu,
• Connor P. Cox and
• Astrid M. Müller

Beilstein J. Nanotechnol. 2025, 16, 349–361, doi:10.3762/bjnano.16.26

• electrode was a Pt foil (Aldrich, 0.025 mm thick, 99.9%), and an Ag/AgCl (BaSi) reference electrode, calibrated against a reversible hydrogen electrode (Gaskatel HydroFlex®), was used. Produced gas was detected by an in-line gas chromatograph (GC, SRI, Multi-Gas #5 configuration) connected to the 2 mL

Comparison of organic and inorganic hole transport layers in double perovskite material-based solar cell

• Deepika K and
• Arjun Singh

Beilstein J. Nanotechnol. 2025, 16, 119–127, doi:10.3762/bjnano.16.11

• Karapinar [2] fabricated a dye-sensitized solar cell (DSSC) with selenium@activated carbon (Se@AC) composites as an alternative to the Pt counter electrode (CE) via chemical activation. The fabricated DSSC showed a power conversion efficiency (PCE) of 5.67%, an open-circuit voltage (VOC) of 0.648 V, a short

• -circuit current density (JSC) of 13.26 mA/cm2, and a fill factor (FF) of 66%. The PCE is close to that of the Pt-based counter electrode (PCE = 6.86%). Akman [3] used hydrothermal methods to synthesize the photoanodes with different doping sources to further improve the stability of DSSCs. For 1.0 mol

Precursor sticking coefficient determination from indented deposits fabricated by electron beam induced deposition

• Alexander Kuprava and
• Michael Huth

Beilstein J. Nanotechnol. 2025, 16, 35–43, doi:10.3762/bjnano.16.4

• itself once the first closed layer is formed. In another series of surface-science-oriented works, the sticking coefficient has been studied for small organic molecules, such as allyl methyl ether on Si(100) [17], trimethylamine on Si(001) [18], tetrahydrofuran on Si(001) [19], and benzene on Pt(111) [20

• temperature. The AFM scans in Figure 5 clearly indicate a flat-top deposit from which a growth rate of 1.75 nm/s can be deduced. In contradistinction to the volcano-shaped deposits observed for the Cr-precursor, with the Pt-precursor no elevated rim region develops, the reasons for which are discussed next

• precursor, deposits using Me3CpPtMe did not show any indent even at the highest currents available for our instrument, which suggests that the diffusion coefficient and residence time for the Cr(C6H6)2 precursor are noticeably larger than the ones for Me3CpPtMe. The larger growth rate of the Pt-precursor is

Ion-induced surface reactions and deposition from Pt(CO)₂Cl₂ and Pt(CO)₂Br₂

• Mohammed K. Abdel-Rahman,
• Patrick M. Eckhert,
• Atul Chaudhary,
• Johnathon M. Johnson,
• Jo-Chi Yu,
• Lisa McElwee-White and
• D. Howard Fairbrother

Beilstein J. Nanotechnol. 2024, 15, 1427–1439, doi:10.3762/bjnano.15.115

• 10.3762/bjnano.15.115 Abstract Ion beam-induced deposition (IBID) using Pt(CO)2Cl2 and Pt(CO)2Br2 as precursors has been studied with ultrahigh-vacuum (UHV) surface science techniques to provide insights into the elementary reaction steps involved in deposition, complemented by analysis of deposits formed

• under steady-state conditions. X-ray photoelectron spectroscopy (XPS) and mass spectrometry data from monolayer thick films of Pt(CO)2Cl2 and Pt(CO)2Br2 exposed to 3 keV Ar+, He+, and H2+ ions indicate that deposition is initiated by the desorption of both CO ligands, a process ascribed to momentum

• transfer from the incident ion to adsorbed precursor molecules. This precursor decomposition step is accompanied by a decrease in the oxidation state of the Pt(II) atoms and, in IBID, represents the elementary reaction step that converts the molecular precursor into an involatile PtX2 species. Upon further

New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures

• Bartosz Pruchnik,
• Krzysztof Kwoka,
• Ewelina Gacka,
• Dominik Badura,
• Piotr Kunicki,
• Andrzej Sierakowski,
• Paweł Janus,
• Tomasz Piasecki and
• Teodor Gotszalk

Beilstein J. Nanotechnol. 2024, 15, 1273–1282, doi:10.3762/bjnano.15.103

• mismatch in the thermal expansion coefficients of the opMEMS materials (Pt: 8.9 µm/mK, Si3N4: 3.3 μm/mK) [37]. Joule heat is dissipated in the actuation lines (Figure 2b,c), which then causes transverse bending of the whole opMEMS bridge. The opMEMS bridges are also susceptible to electromagnetic actuation

• (GIS) for the supply of precursors required in the FEBID processes. In the experiments carried out, trimethyl(methylcyclopentadienyl)platinum(IV) (MeCpPtMe3) was used to deposit the Pt(C) material. Microfabrication of nanostructures and modification of opMEMS, both mechanically and electrically, is

Photocatalytic methane oxidation over a TiO₂/SiNWs p–n junction catalyst at room temperature

• Qui Thanh Hoai Ta,
• Luan Minh Nguyen,
• Ngoc Hoi Nguyen,
• Phan Khanh Thinh Nguyen and
• Dai Hai Nguyen

Beilstein J. Nanotechnol. 2024, 15, 1132–1141, doi:10.3762/bjnano.15.92

• photocatalytic efficiency. For years, doping of metal nanoparticles (NPs) into a semiconductor matrix has been extensively studied to enhance photocatalytic CH4 oxidation performance. Metal NPs in, for example, Au/TiO2, Au@Pd/ZnO, and Pt@Cu/TiO2 composites act as electron scavenger centers and own more free

Direct electron beam writing of silver using a β-diketonate precursor: first insights

• Katja Höflich,
• Krzysztof Maćkosz,
• Chinmai S. Jureddy,
• Aleksei Tsarapkin and
• Ivo Utke

Beilstein J. Nanotechnol. 2024, 15, 1117–1124, doi:10.3762/bjnano.15.90

• obtained [34]. For planar deposits, similar microstructures were obtained during platinum deposition using Pt(η5-CpMe)Me3 [35] and ruthenium deposition using (EtCp)2Ru [36], both in combination with post-deposition purification employing electron beam irradiation in a water atmosphere. For the case of

• injection systems as it operates at a temperature of 80 °C, comparable to the ubiquituous Pt precursor Pt(η5-CpMe)Me3. At a required stage temperature of about 60 °C, the residence time of the molecules is long enough to realize sizable vertical growth rates and halo-free deposition for tightly focused

Effect of wavelength and liquid on formation of Ag, Au, Ag/Au nanoparticles via picosecond laser ablation and SERS-based detection of DMMP

• Sree Satya Bharati Moram,
• Chandu Byram and
• Venugopal Rao Soma

Beilstein J. Nanotechnol. 2024, 15, 1054–1069, doi:10.3762/bjnano.15.86

• laser ablating Au/Fe multilayers with varying thicknesses and deposition orders. Jakobi et al. [26] reported the synthesis of Pt–Ir alloy NPs by femtosecond laser ablation of a Pt9Ir target in acetone and further utilized as PtIr electrodes. In recent years, laser-ablated NPs/NSs have gained prominent

Atomistic insights into the morphological dynamics of gold and platinum nanoparticles: MD simulations in vacuum and aqueous media

• Evangelos Voyiatzis,
• Eugenia Valsami-Jones and
• Antreas Afantitis

Beilstein J. Nanotechnol. 2024, 15, 995–1009, doi:10.3762/bjnano.15.81

• adapting theories suitable for bulk materials to NPs; examples include the classical nucleation theory [33], phenomenological models [34][35][36], as well as molecular simulations [37][38][39][40]. A molecular dynamics (MD) study of shape transformation and melting of tetrahexahedral Pt NPs has been

• carried out by Wen et al. [41]. Wang et al. employed ab initio MD to describe the melting of icosahedral Au nanoclusters [42]. The structural and thermal stability of high-index-faceted Pt NPs was addressed by Zeng et al. [43]. Similarly, the thermal stability of unsupported Au NPs was investigated by

• clusters consisting of 1157 atoms [51]. Some light on the microscopic origin of the anisotropic growth of gold NPs has been cast via molecular dynamics simulations [52]. In a similar way, Lümmen and Kraska investigated the homogeneous nucleation and cluster growth of Pt clusters from supersaturated vapour

Water-assisted purification during electron beam-induced deposition of platinum and gold

• Cristiano Glessi,
• Fabian A. Polman and
• Cornelis W. Hagen

Beilstein J. Nanotechnol. 2024, 15, 884–896, doi:10.3762/bjnano.15.73

• [16]. One of the most widely used FEBID gaseous precursors is trimethyl(methylcyclopentadienyl)platinum(IV) (MeCpPtMe3), which, under standard deposition conditions, leads to the deposition of a material that consists of around 15 atom % Pt, with the rest of the material consisting of an amorphous

• carbon matrix [15][17][18]. Variation of deposition conditions [15] and post-deposition purifications [18][19][20][21] have all led to an increased Pt content in the deposits, but a straightforward method of obtaining pure material is still a challenge. However, Shawrav et al. [22] managed to deposit

• pure gold structures in a single process step using the co-injection of the precursor Au(tfac)Me2 and water. This inspired the present work, in which we aim for the direct deposition of high-purity Au and Pt nanostructures achieved through the co-injection of water and the precursors Au(acac)Me2 and

Level set simulation of focused ion beam sputtering of a multilayer substrate

• Alexander V. Rumyantsev,
• Nikolai I. Borgardt,
• Roman L. Volkov and
• Yuri A. Chaplygin

Beilstein J. Nanotechnol. 2024, 15, 733–742, doi:10.3762/bjnano.15.61

• beam workstation Helios Nanolab 650. Both types of test structures were fabricated using 30 kV accelerating voltage and an ion beam current of I = 900 pA. The chamber pressure was not higher then 10−6 mbar. A layer of platinum and amorphous carbon (Pt + a-C) was deposited onto the manufactured