Almost ever since the advent of the microelectronics adventure, silicon-based semiconductor technology has been largely dominant. However, for a few years now this technology has exhibited some fundamental limitations in miniaturization and processing speed and power consumption. Hence, new inorganic semiconductor materials and new architectures are being progressively introduced. The development of high-performance devices is not the only objective of the electronic industry. The need for low-cost devices processed industrially on flexible and light substrates over very large surfaces has led electronic components based on organic semiconductors. The organic materials used nowadays are typically made of single molecules in highly ordered assemblies or of polymeric semiconductors in thin films. It is important to develop and improve two- and threedimensional characterization techniques that can be utilized on both organic and inorganic semiconductors. These techniques should allow nanometer spatial resolution over a broad dynamic range. Ideally, they should also be able to probe the elemental distribution and to provide information on chemical bonding.