Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

• Nico Klingner,
• Gregor Hlawacek,
• Paul Mazarov,
• Wolfgang Pilz,
• Fabian Meyer and
• Lothar Bischoff

Beilstein J. Nanotechnol. 2020, 11, 1742–1749, doi:10.3762/bjnano.11.156

• the instrument itself. While GFIS-driven noble gas beams still deliver the best lateral resolution, LMAISs allow for a wider application spectrum due to the vast number of different ion species and charge states available. Especially for very light ions, such as Li, LMAIS FIBs provide nearly the same

Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

• Serguei Chiriaev,
• Luciana Tavares,
• Vadzim Adashkevich,
• Arkadiusz J. Goszczak and
• Horst-Günter Rubahn

Beilstein J. Nanotechnol. 2020, 11, 1693–1703, doi:10.3762/bjnano.11.151

• direct, maskless surface patterning with a superior lateral resolution and depth control [2][3]. The portfolio of the currently used FIB-based and FIB-assisted surface patterning techniques includes a number of different methods, such as ion-beam sputtering of surface layers (ion-beam milling), ion-beam

Helium ion microscope – secondary ion mass spectrometry for geological materials

• Matthew R. Ball,
• Richard J. M. Taylor,
• Joshua F. Einsle,
• Fouzia Khanom,
• Christelle Guillermier and
• Richard J. Harrison

Beilstein J. Nanotechnol. 2020, 11, 1504–1515, doi:10.3762/bjnano.11.133

• , appropriate data processing techniques can extract data with meaningful counting statistics for elemental and isotopic analysis, although this processing does have consequences, for example, it can reduce the lateral resolution significantly. One method for increasing count rates is to regrid data

• resolution offered by HIM–SIMS. Another method is to sum counts over individual regions of the data, maintaining the lateral resolution of the data, but increasing the count rates under the assumption that different regions have roughly homogenous concentrations of an element or isotope ratios. In the case

An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

• Santiago H. Andany,
• Gregor Hlawacek,
• Stefan Hummel,
• Charlène Brillard,
• Mustafa Kangül and
• Georg E. Fantner

Beilstein J. Nanotechnol. 2020, 11, 1272–1279, doi:10.3762/bjnano.11.111

• SEM in terms of lateral resolution, depth of field, surface sensitivity, and ability to image electrically insulating samples [13]. Furthermore, nanoscale structuration with noble gas ions can yield sub-10 nm structures without unwanted metal ion implantation, a sizeable advantage over traditional

• gallium-ion FIBs. The resulting combined AFM–HIM instrument would, therefore, profit from the sub-nanometer lateral resolution of the HIM and the atomic resolution in the vertical axis of the AFM, proving particularly powerful for high-resolution correlative characterization of non-conductive samples

• do have very different strengths. The HIM, for example, has a very good lateral resolution and a large depth of field, which makes it well suited for imaging high aspect ratio structures. The Z-resolution of the method, however, is less accurate, since the height of objects has to be reconstructed

Three-dimensional solvation structure of ethanol on carbonate minerals

• Hagen Söngen,
• Ygor Morais Jaques,
• Peter Spijker,
• Christoph Marutschke,
• Stefanie Klassen,
• Ilka Hermes,
• Ralf Bechstein,
• Lidija Zivanovic,
• John Tracey,
• Adam S. Foster and
• Angelika Kühnle

Beilstein J. Nanotechnol. 2020, 11, 891–898, doi:10.3762/bjnano.11.74

• investigated in a combined X-ray reflectivity and MD study [15]. As a result, ethanol was found to form layers above the calcite surface. However, due to the lack of lateral resolution in the X-ray reflectivity measurements, no experimental information on the lateral order within the first layer has been

Atomic force acoustic microscopy reveals the influence of substrate stiffness and topography on cell behavior

• Yan Liu,
• Li Li,
• Xing Chen,
• Ying Wang,
• Meng-Nan Liu,
• Jin Yan,
• Liang Cao,
• Lu Wang and
• Zuo-Bin Wang

Beilstein J. Nanotechnol. 2019, 10, 2329–2337, doi:10.3762/bjnano.10.223

• able to characterize materials at high lateral resolution. To produce substrates of tunable stiffness and topography, we imprint nanostripe patterns on undeveloped and developed SU-8 photoresist films using electron-beam lithography (EBL). Elastic deformations of the substrate surfaces and the cells

Microbubbles decorated with dendronized magnetic nanoparticles for biomedical imaging: effective stabilization via fluorous interactions

• Da Shi,
• Justine Wallyn,
• Dinh-Vu Nguyen,
• Francis Perton,
• Delphine Felder-Flesch,
• Sylvie Bégin-Colin,
• Mounir Maaloum and
• Marie Pierre Krafft

Beilstein J. Nanotechnol. 2019, 10, 2103–2115, doi:10.3762/bjnano.10.205

• film height. The mean height of both IONP@C2F5OEG8Den and IONP@C2H5OEG8Den is 10.0 ± 1.7 nm, as determined by a statistical analysis of the particles (Figure 9). Usually, it is observed that the nanoparticles are convoluted by the AFM probe, which decreases the lateral resolution of the technique. Both

Ion mobility and material transport on KBr in air as a function of the relative humidity

• Dominik J. Kirpal,
• Korbinian Pürckhauer,
• Alfred J. Weymouth and
• Franz J. Giessibl

Beilstein J. Nanotechnol. 2019, 10, 2084–2093, doi:10.3762/bjnano.10.203

• important. AFM enables high lateral resolution, although the imaging of structures with rough topographies is challenging. When scanning rugged surfaces the back structure of the tip apex becomes more important. As the tip follows the surface while keeping the tip–sample interaction constant, side effects

Growth dynamics and light scattering of gold nanoparticles in situ synthesized at high concentration in thin polymer films

• Corentin Guyot,
• Philippe Vandestrick,
• Ingrid Marenne,
• Olivier Deparis and
• Michel Voué

Beilstein J. Nanotechnol. 2019, 10, 1768–1777, doi:10.3762/bjnano.10.172

• ) images were recorded at an angle of incidence θi of 42°. The lateral resolution was about 1 μm/pixel and the mapped surfaces were 450 μm × 380 μm large. The ellipsometric data were processed either with the EP4 software (Accurion) or using custom-written routines. Ellipsometric images were taken during

Stationary beam full-field transmission helium ion microscopy using sub-50 keV He⁺: Projected images and intensity patterns

• Michael Mousley,
• Santhana Eswara,
• Olivier De Castro,
• Olivier Bouton,
• Nico Klingner,
• Christoph T. Koch,
• Gregor Hlawacek and
• Tom Wirtz

Beilstein J. Nanotechnol. 2019, 10, 1648–1657, doi:10.3762/bjnano.10.160

• less than 0.5 nm [1]. The short wavelength of helium ions results in a reduced diffraction limit for helium ion probes compared to electrons. Helium ions also have a smaller penetration depth than electrons of similar energy and a reduced interaction volume [2], increasing the lateral resolution. In

Subsurface imaging of flexible circuits via contact resonance atomic force microscopy

• Wenting Wang,
• Chengfu Ma,
• Yuhang Chen,
• Lei Zheng,
• Huarong Liu and
• Jiaru Chu

Beilstein J. Nanotechnol. 2019, 10, 1636–1647, doi:10.3762/bjnano.10.159

• . This indicates a spatial resolution of far better than 100 nm for CR-AFM subsurface imaging on such a sample. In fact, the subsurface lateral resolution should be closely related to several parameters and working conditions, such as contact radius, cover thickness and many others [22][45][46][47

Kelvin probe force microscopy work function characterization of transition metal oxide crystals under ongoing reduction and oxidation

• Dominik Wrana,
• Karol Cieślik,
• Wojciech Belza,
• Christian Rodenbücher,
• Krzysztof Szot and
• Franciszek Krok

Beilstein J. Nanotechnol. 2019, 10, 1596–1607, doi:10.3762/bjnano.10.155

• future energy production and storage. As the majority of applications involve the use of heterostructures, the most suitable characterization technique is Kelvin probe force microscopy (KPFM), which provides excellent energetic and lateral resolution. In this paper, we demonstrate precise

• significant variations among the different crystallographic facets were also observed. Despite the remarkable height of the TiO nanowires, KPFM was implemented to achieve a high lateral resolution of 15 nm, which is close to the topographical limit. In this study, we also show the unique possibility of

• [9] or Ti/TiOx/Ti memristive devices [10]. Of the two KPFM operation modes, frequency modulation (FM) has proven to be more suitable for the investigation of oxide nanostructures (due to the higher lateral resolution) as compared to amplitude modulation (AM) [11]. Therefore, in our study, we present

Imaging the surface potential at the steps on the rutile TiO₂(110) surface by Kelvin probe force microscopy

• Masato Miyazaki,
• Huan Fei Wen,
• Quanzhen Zhang,
• Yuuki Adachi,
• Jan Brndiar,
• Ivan Štich,
• Yan Jun Li and
• Yasuhiro Sugawara

Beilstein J. Nanotechnol. 2019, 10, 1228–1236, doi:10.3762/bjnano.10.122

• observed with a lateral resolution of several nanometers by Kelvin probe force microscopy (KPFM) [29][30]. However, the dependence of surface potential on direction and structure of steps such as [001], and has not yet been clarified. In scanning tunneling microscopy (STM) [31] studies, three typical

Sputtering of silicon nanopowders by an argon cluster ion beam

• Xiaomei Zeng,
• Vasiliy Pelenovich,
• Zhenguo Wang,
• Wenbin Zuo,
• Sergey Belykh,
• Alexander Tolstogouzov,
• Dejun Fu and
• Xiangheng Xiao

Beilstein J. Nanotechnol. 2019, 10, 135–143, doi:10.3762/bjnano.10.13

• the nanoparticles are filled by debris, which due to the limited lateral resolution cannot be observed. Such filling of the voids results in densification of the top surface layer. Therefore, as the number of contacts between neighbor nanoparticles increases, consequently, we can expect the weakening

Electrostatic force microscopy for the accurate characterization of interphases in nanocomposites

• Diana El Khoury,
• Richard Arinero,
• Jean-Charles Laurentie,
• Mikhaël Bechelany,
• Michel Ramonda and
• Jérôme Castellon

Beilstein J. Nanotechnol. 2018, 9, 2999–3012, doi:10.3762/bjnano.9.279

• lateral resolution and sensitivity [60]. The component of the gradient varying at the double of the electrical potential gradient is the only purely capacitive part without the need of further treatment, and it is described as: EFM measurements were performed under ambient air conditions with a commercial

Size limits of magnetic-domain engineering in continuous in-plane exchange-bias prototype films

• Alexander Gaul,
• Daniel Emmrich,
• Timo Ueltzhöffer,
• Henning Huckfeldt,
• Hatice Doğanay,
• Johanna Hackl,
• Muhammad Imtiaz Khan,
• Daniel M. Gottlob,
• Gregor Hartmann,
• André Beyer,
• Dennis Holzinger,
• Slavomír Nemšák,
• Claus M. Schneider,
• Armin Gölzhäuser,
• Günter Reiss and
• Arno Ehresmann

Beilstein J. Nanotechnol. 2018, 9, 2968–2979, doi:10.3762/bjnano.9.276

• ) width, varying with material-specific magnetic parameters, but could not be tested yet. For exchange-bias material systems with in-plane anisotropy, typical DW widths are of the order of several hundreds of nanometers [16] to some micrometers [31]. A patterning method with lateral resolution

• present there is no method available where the lateral resolution is considerably higher as the expected minimum pattern sizes. Here we suggest mask-less patterning by the highly focused beam of a helium ion microscope (HIM), to lower the limits of ion beam induced magnetic pattering in continuous layer

• nanometers [25]. Local magnetic property modifications in thin films by narrow beams of light ions, in contrast, do not suffer from this drawback due to more localized energy deposition [35]. Currently patterning by kiloelectronvolt light ion bombardment is performed using shadow masks where the lateral

Charged particle single nanometre manufacturing

• Philip D. Prewett,
• Cornelis W. Hagen,
• Claudia Lenk,
• Steve Lenk,
• Marcus Kaestner,
• Tzvetan Ivanov,
• Ahmad Ahmad,
• Ivo W. Rangelow,
• Xiaoqing Shi,
• Stuart A. Boden,
• Alex P. G. Robinson,
• Dongxu Yang,
• Sangeetha Hari,
• Marijke Scotuzzi and
• Ejaz Huq

Beilstein J. Nanotechnol. 2018, 9, 2855–2882, doi:10.3762/bjnano.9.266

• fabrication of isolated structures, for example by Koops et al. [79], and by Frabboni et al. [80] who attempted to overcome the resolution limit due to the presence of a bulk or thin substrate by growing suspended nanowires by EBID on the tip of a tilted pillar, achieving a lateral resolution of 5 nm. Sub-10

Biomimetic surface structures in steel fabricated with femtosecond laser pulses: influence of laser rescanning on morphology and wettability

• Camilo Florian Baron,
• Alexandros Mimidis,
• Daniel Puerto,
• Evangelos Skoulas,
• Emmanuel Stratakis,
• Javier Solis and
• Jan Siegel

Beilstein J. Nanotechnol. 2018, 9, 2802–2812, doi:10.3762/bjnano.9.262

• with an optical microscope (Nikon Eclipse-Ti) using 460 nm illumination and objectives with numerical aperture of 0.06, 0.3 or 0.9 and nominal magnification of 2.5×, 10× or 100×. The nominal maximum lateral resolution of the system is Rxy ≈ 255 nm and Rz ≈ 1.1 µm in the vertical direction. The

Spin-coated planar Sb₂S₃ hybrid solar cells approaching 5% efficiency

• Pascal Kaienburg,
• Benjamin Klingebiel and
• Thomas Kirchartz

Beilstein J. Nanotechnol. 2018, 9, 2114–2124, doi:10.3762/bjnano.9.200

• lateral resolution equals approximately 1 nm at 20 kV and the measurement was performed under a vacuum base pressure of 10−6 mbar. UV–vis measurements were performed with a Lambda 950 spectrophotometer from PerkinElmer equipped with an integrating sphere in the UV–vis range from 300 nm to 1000 nm

Know your full potential: Quantitative Kelvin probe force microscopy on nanoscale electrical devices

• Amelie Axt,
• Ilka M. Hermes,
• Victor W. Bergmann,
• Niklas Tausendpfund and
• Stefan A. L. Weber

Beilstein J. Nanotechnol. 2018, 9, 1809–1819, doi:10.3762/bjnano.9.172

• , the local potential distribution needs to be correlated to the constituent layers of the cell. Therefore, a high lateral resolution together with a reliable quantification of the local potential is required. In the past, KPFM measurements have frequently been used to image potential distributions on

• cross talk [19][21][22] and the choice of frequencies. All in all, an overwhelming number of studies have reported a superior lateral resolution, both laterally and in voltage, for FM-KPFM [18][19][23][24][25][26]. Li et al. [19] also reported a higher sensitivity for the potential detection. Until now

• [20]. This so-called stray capacitance [35] can decrease the lateral resolution by averaging the surface potential over a larger area. To reduce the effect of the long-ranged electrostatic interaction of the cantilever, force gradient detection can be used [18][20][23]. The presence of a tip–sample

A novel copper precursor for electron beam induced deposition

• Caspar Haverkamp,
• George Sarau,
• Mikhail N. Polyakov,
• Ivo Utke,
• Marcos V. Puydinger dos Santos,
• Silke Christiansen and
• Katja Höflich

Beilstein J. Nanotechnol. 2018, 9, 1220–1227, doi:10.3762/bjnano.9.113

• patterning possibilities of varying point distances and dwell times, three-dimensional shapes with high lateral resolution can be fabricated [4][5][6]. There is ongoing research for new precursors to improve the quality of the deposits and expand the choice of materials [2][7]. To deposit metallic structures

Room-temperature single-photon emitters in titanium dioxide optical defects

• Kelvin Chung,
• Yu H. Leung,
• Chap H. To,
• Aleksandra B. Djurišić and
• Snjezana Tomljenovic-Hanic

Beilstein J. Nanotechnol. 2018, 9, 1085–1094, doi:10.3762/bjnano.9.100

• (λ = 532 nm) the intensity of which was controlled with a neutral density filter (ND). The laser is reflected off a dichroic mirror (DM) and focussed onto the sample with a 100× (0.95 NA) air objective (O). The lateral resolution and diffraction-limited spot size was approximately 280 nm (in the

Nanoscale mapping of dielectric properties based on surface adhesion force measurements

• Ying Wang,
• Yue Shen,
• Xingya Wang,
• Zhiwei Shen,
• Bin Li,
• Jun Hu and
• Yi Zhang

Beilstein J. Nanotechnol. 2018, 9, 900–906, doi:10.3762/bjnano.9.84

• -range electrostatic interactions between the sample and a biased AFM tip, which in turn is closely related to the intrinsic dielectric properties of materials. In this regard, one of the primary disadvantages of these dielectric-related AFM measurements is their lower lateral resolution compared to the

• achieved with high lateral resolution by combining the advantages of the electrowetting (EW) effect [33] and an AFM imaging mode, PeakForce Quantitative Nano-Mechanics (PF-QNM) [34]. Electrowetting is a phenomenon in which the wetting properties of a dielectric surface are modified using an external

• a higher lateral resolution comparable to the conventional AFM modes. The dependence of the adhesion force under a biased AFM tip on the reduction degree of GO was also studied through X-ray photoelectron spectroscopy (XPS) experiments. Figure 4a shows the average adhesion forces of the three

Gas-assisted silver deposition with a focused electron beam

• Luisa Berger,
• Katarzyna Madajska,
• Iwona B. Szymanska,
• Katja Höflich,
• Mikhail N. Polyakov,
• Jakub Jurczyk,
• Carlos Guerra-Nuñez and
• Ivo Utke

Beilstein J. Nanotechnol. 2018, 9, 224–232, doi:10.3762/bjnano.9.24

• Physics and Applied Computer Science, Al. Mickiewicza 30, 30-059 Kraków, Poland 10.3762/bjnano.9.24 Abstract Focused electron beam induced deposition (FEBID) is a flexible direct-write method to obtain defined structures with a high lateral resolution. In order to use this technique in application fields

• , silver crystal growth presents a strong dependency on electron dose and precursor refreshment. Keywords: focused electron beam induced deposition; low volatility precursor; silver; Introduction The fabrication of defined patterns in the nanometer regime demands techniques with high lateral resolution

• and preferably as few processing steps as possible. Therefore, a maskless direct-write method would be favorable in comparison to common resist-based lithography techniques, which require multiple steps and are reaching their lateral resolution limits. Focused electron beam induced deposition (FEBID

Combined scanning probe electronic and thermal characterization of an indium arsenide nanowire

• Tino Wagner,
• Fabian Menges,
• Heike Riel,
• Bernd Gotsmann and
• Andreas Stemmer

Beilstein J. Nanotechnol. 2018, 9, 129–136, doi:10.3762/bjnano.9.15

• nanoscale tip with the surface. So far, electrical and thermal device characterization by scanning probe microscopy has often suffered from low lateral resolution [3][4][5][6], long-distance averaging effects [7][8][9], and topography-induced crosstalk [10][11][12], allowing for a mainly qualitative data

• the temperature to be detected with high sensitivity [12]. KFM is a non-contact scanning probe microscopy technique to measure local electrostatic potentials with high lateral resolution. The electrostatic force induced by an ac voltage bias between tip and surface is minimized by adjusting a dc

• topography, geometrical artefacts and feedback problems can be minimized by appropriate control schemes [20]. The typical lateral resolution of our SThM and KFM setups is on the order of the tip radius (below 10 nm), at a noise level of 20 μK·Hz−0.5 and 1 mV·Hz−0.5, respectively, depending on operating