Search for "electron-beam lithography" in Full Text gives 113 result(s) in Beilstein Journal of Nanotechnology.
Beilstein J. Nanotechnol. 2015, 6, 1319–1331, doi:10.3762/bjnano.6.136
Beilstein J. Nanotechnol. 2015, 6, 1205–1211, doi:10.3762/bjnano.6.123
Beilstein J. Nanotechnol. 2015, 6, 1107–1115, doi:10.3762/bjnano.6.112
Beilstein J. Nanotechnol. 2015, 6, 976–986, doi:10.3762/bjnano.6.101
Beilstein J. Nanotechnol. 2015, 6, 711–719, doi:10.3762/bjnano.6.72
Beilstein J. Nanotechnol. 2015, 6, 697–703, doi:10.3762/bjnano.6.70
Beilstein J. Nanotechnol. 2015, 6, 462–471, doi:10.3762/bjnano.6.47
Beilstein J. Nanotechnol. 2014, 5, 2275–2292, doi:10.3762/bjnano.5.237
Beilstein J. Nanotechnol. 2014, 5, 2230–2239, doi:10.3762/bjnano.5.232
Beilstein J. Nanotechnol. 2014, 5, 1933–1943, doi:10.3762/bjnano.5.204
Beilstein J. Nanotechnol. 2014, 5, 1918–1925, doi:10.3762/bjnano.5.202
Beilstein J. Nanotechnol. 2014, 5, 1664–1674, doi:10.3762/bjnano.5.177
Beilstein J. Nanotechnol. 2014, 5, 1441–1449, doi:10.3762/bjnano.5.156
Beilstein J. Nanotechnol. 2014, 5, 1285–1290, doi:10.3762/bjnano.5.142
Beilstein J. Nanotechnol. 2014, 5, 1268–1284, doi:10.3762/bjnano.5.141
Beilstein J. Nanotechnol. 2014, 5, 1203–1209, doi:10.3762/bjnano.5.132
Beilstein J. Nanotechnol. 2014, 5, 577–586, doi:10.3762/bjnano.5.68
Beilstein J. Nanotechnol. 2014, 5, 188–194, doi:10.3762/bjnano.5.20
Beilstein J. Nanotechnol. 2013, 4, 588–602, doi:10.3762/bjnano.4.66
Beilstein J. Nanotechnol. 2013, 4, 534–541, doi:10.3762/bjnano.4.62
Beilstein J. Nanotechnol. 2013, 4, 336–344, doi:10.3762/bjnano.4.39
Beilstein J. Nanotechnol. 2013, 4, 330–335, doi:10.3762/bjnano.4.38
Beilstein J. Nanotechnol. 2013, 4, 129–152, doi:10.3762/bjnano.4.14
Beilstein J. Nanotechnol. 2013, 4, 57–65, doi:10.3762/bjnano.4.6
Beilstein J. Nanotechnol. 2012, 3, 895–908, doi:10.3762/bjnano.3.100