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Search for "spectroscopy" in Full Text gives 1364 result(s) in Beilstein Journal of Nanotechnology. Showing first 200.

Vinorelbine-loaded multifunctional magnetic nanoparticles as anticancer drug delivery systems: synthesis, characterization, and in vitro release study

  • Zeynep Özcan and
  • Afife Binnaz Hazar Yoruç

Beilstein J. Nanotechnol. 2024, 15, 256–269, doi:10.3762/bjnano.15.24

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  • examining the binding of PEG to PDA/Fe3O4 NPs and the resulting chemical structure using FTIR spectroscopy. According to the FTIR analysis results, the peak at 585 cm–1 in the spectrum corresponds to the vibration associated with the Fe–O bond in magnetic nanoparticles [49]. The peak observed at 3400 cm–1
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Published 28 Feb 2024

Exploring disorder correlations in superconducting systems: spectroscopic insights and matrix element effects

  • Vyacheslav D. Neverov,
  • Alexander E. Lukyanov,
  • Andrey V. Krasavin,
  • Alexei Vagov,
  • Boris G. Lvov and
  • Mihail D. Croitoru

Beilstein J. Nanotechnol. 2024, 15, 199–206, doi:10.3762/bjnano.15.19

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  • previously reported in [47]. This work focuses on a different aspect of the influence of the disorder correlations, investigating how the latter affect key spectral characteristics of a superconductor, that is, the energy level distribution. Recent scanning tunneling spectroscopy experiments on highly
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Published 12 Feb 2024

Graphene removal by water-assisted focused electron-beam-induced etching – unveiling the dose and dwell time impact on the etch profile and topographical changes in SiO2 substrates

  • Aleksandra Szkudlarek,
  • Jan M. Michalik,
  • Inés Serrano-Esparza,
  • Zdeněk Nováček,
  • Veronika Novotná,
  • Piotr Ozga,
  • Czesław Kapusta and
  • José María De Teresa

Beilstein J. Nanotechnol. 2024, 15, 190–198, doi:10.3762/bjnano.15.18

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  • 50 nm (20 nm in the best case). However, due to the long residual time of the water molecules inside the SEM chamber, the collection of an image can further destroy the investigated material. Therefore, we performed a second series of experiments for a detailed analysis with Raman spectroscopy and
  • estimated beam size equal to 10 nm (FWHM), are summarized in Table 1. The results of Raman spectroscopy measurements are shown in Figure 2C and Figure 2D. This technique is not only sensitive to the number of graphitic layers in graphene but, more importantly, also to the number of defects, which can be
  • etching using water-assisted FEBIE, the final interpretation of SiO2 morphological changes would require more efforts. For example, treating the subject separately with more sophisticated spectroscopy techniques to provide the data on chemical phase and types of Si–OH bonds on the surface and more
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Published 07 Feb 2024

Nanocarrier systems loaded with IR780, iron oxide nanoparticles and chlorambucil for cancer theragnostics

  • Phuong-Thao Dang-Luong,
  • Hong-Phuc Nguyen,
  • Loc Le-Tuan,
  • Xuan-Thang Cao,
  • Vy Tran-Anh and
  • Hieu Vu Quang

Beilstein J. Nanotechnol. 2024, 15, 180–189, doi:10.3762/bjnano.15.17

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  • oleic acid was added to the solution and heated to 70 °C for 30 min. The synthesized IO NPs were washed three times with 50 mL of DCM and stored at −80 °C for further experiments. Synthesis of folate-F127 The synthesis was done as previously described [13]. The Fourier-transform infrared spectroscopy
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Published 06 Feb 2024

Modification of graphene oxide and its effect on properties of natural rubber/graphene oxide nanocomposites

  • Nghiem Thi Thuong,
  • Le Dinh Quang,
  • Vu Quoc Cuong,
  • Cao Hong Ha,
  • Nguyen Ba Lam and
  • Seiichi Kawahara

Beilstein J. Nanotechnol. 2024, 15, 168–179, doi:10.3762/bjnano.15.16

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  • characterized by X-ray diffraction (XRD), Fourier-transform infrared spectroscopy, contact angle, thermal gravimetric analysis, and scanning electron microscopy. The XRD results showed the appearance of an amorphous region of silica particles at a diffraction angle of 22°. The formation of silica was
  • conditions to determine the ideal condition to modify GO for grafting onto NR. The GO-VTES products were characterized using X-ray diffraction (XRD), contact angle, 29Si NMR, Fourier-transform infrared spectroscopy (FTIR), and morphology analysis. The GO-VTES was expected to improve the mechanical properties
  • a clear evidence for the formation of a silica layer on the surface of GO as a result of the reaction between GO and VTES. 29Si NMR spectroscopy To understand the degree of hydrolysis and condensation of VTES to form silica during GO modification, 29Si NMR spectra of GO-VTES(a) and GO-VTES(b) were
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Published 05 Feb 2024

Ferromagnetic resonance spectra of linear magnetosome chains

  • Elizaveta M. Gubanova and
  • Nikolai A. Usov

Beilstein J. Nanotechnol. 2024, 15, 157–167, doi:10.3762/bjnano.15.15

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  • of magnetic anisotropy, the direction of the particle easy anisotropy axes, and other parameters. In addition, the FMR spectrum is sensitive to the presence of magnetostatic interactions in dense assemblies of magnetic nanoparticles. Thus, ferromagnetic resonance spectroscopy is a promising technique
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Published 05 Feb 2024

CdSe/ZnS quantum dots as a booster in the active layer of distributed ternary organic photovoltaics

  • Gabriela Lewińska,
  • Piotr Jeleń,
  • Zofia Kucia,
  • Maciej Sitarz,
  • Łukasz Walczak,
  • Bartłomiej Szafraniak,
  • Jerzy Sanetra and
  • Konstanty W. Marszalek

Beilstein J. Nanotechnol. 2024, 15, 144–156, doi:10.3762/bjnano.15.14

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  • relations of refractive indices and extinction coefficient were investigated. The morphologies of the thin films were studied with atomic force microscopy. The chemical boundaries of the ternary layers were determined by Raman spectroscopy. Based on UPS studies, the energy diagram of the potential devices
  • was determined. The resistivity of the layers was determined using impedance spectroscopy. Simulations (General-Purpose Photovoltaic Device Model) showed a performance improvement in the cells with quantum dots of 0.36–1.45% compared to those without quantum dots. Keywords: efficiency; luminescence
  • nanoparticles, including the size of the shell (0.6 nm), and the core size declared by the manufacturer are included in Table 1. UV–vis spectroscopy was conducted with an Avantes Sensline Ava-Spec ULS-RS-TEC fiber-optic spectrophotometer and an Avantes AvaLight DH-S-BAL-Hal lamp. The absorption and luminescence
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Published 02 Feb 2024

In situ optical sub-wavelength thickness control of porous anodic aluminum oxide

  • Aleksandrs Dutovs,
  • Raimonds Popļausks,
  • Oskars Putāns,
  • Vladislavs Perkanuks,
  • Aušrinė Jurkevičiūtė,
  • Tomas Tamulevičius,
  • Uldis Malinovskis,
  • Iryna Olyshevets,
  • Donats Erts and
  • Juris Prikulis

Beilstein J. Nanotechnol. 2024, 15, 126–133, doi:10.3762/bjnano.15.12

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  • consistently manufacturing PAAO with the targeted thickness. An electrochemical cell with an optical window was designed for reflectance spectroscopy of PAAO during anodization. Real-time fitting of spectra to a transfer-matrix model enabled continuous monitoring of the thickness growth of the PAAO layer
  • microscopy and is particularly valuable for the small-scale production of PAAO-based functional optical coatings. Keywords: electrochemistry; ellipsometry; porous anodic alumina; spectroscopy; thin films; Introduction Porous anodic aluminum oxide (PAAO) is a versatile self-organized material with
  • heating, electrolyte flow [19], arrangement of the electrodes, and crystallographic orientation of the aluminum substrate [20]. In this work, we continuously recorded the reflectance spectra from a PAAO-coated aluminum surface during anodization. In a similar reflective interference spectroscopy (RIfS
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Published 31 Jan 2024

Assessing phytotoxicity and tolerance levels of ZnO nanoparticles on Raphanus sativus: implications for widespread adoptions

  • Pathirannahalage Sahan Samuditha,
  • Nadeesh Madusanka Adassooriya and
  • Nazeera Salim

Beilstein J. Nanotechnol. 2024, 15, 115–125, doi:10.3762/bjnano.15.11

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  • on Raphanus sativus (R. sativus) concerning its tolerance levels, toxicity, and accumulation. ZnO NPs were synthesized by the wet chemical method and characterized by powder X-ray diffraction (PXRD), Fourier-transform infrared (FTIR) spectroscopy, ultraviolet–visible (UV–vis) spectroscopy, dynamic
  • (p < 0.05) in soluble protein content by 23.1%, accompanied by a notable increase in IAA by 31.1%, indicating potential toxicity. The use of atomic absorption spectroscopy confirmed the internalization of zinc in seedlings, with a statistically significant increase (p < 0.05). In control plants
  • synthesized ZnO NPs were characterized via several techniques such as powder X-ray diffraction (PXRD), Fourier-transform infrared (FTIR) spectroscopy, solid-UV–vis spectroscopy, dynamic light scattering (DLS), and scanning electron microscopy (SEM). Then the potential phytotoxicity of the synthesized ZnO NPs
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Published 23 Jan 2024

New application of bimetallic Ag/Pt nanoplates in a colorimetric biosensor for specific detection of E. coli in water

  • Azam Bagheri Pebdeni,
  • Mohammad N. AL-Baiati and
  • Morteza Hosseini

Beilstein J. Nanotechnol. 2024, 15, 95–103, doi:10.3762/bjnano.15.9

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  • spectroscopy (EDS) was used to examine Ag and Pt on the synthesized NPLs (Figure 1b). The percentage of Pt is smaller than that of Ag, indicating that a thin layer of Pt ions has been coated on the surface of Ag NPLs. In the aqueous solution, the Ag/Pt NPLs appear bluish purple. To predict the secondary
  • was measured using UV–vis spectroscopy at a wavelength of 600 nm (OD600). The gold standard method of plate counting was used to estimate the number of bacterial cells. Detection of E. coli for bacterial assays Following the optimization of the experimental settings, various concentrations of E. coli
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Published 17 Jan 2024

Berberine-loaded polylactic acid nanofiber scaffold as a drug delivery system: The relationship between chemical characteristics, drug-release behavior, and antibacterial efficiency

  • Le Thi Le,
  • Hue Thi Nguyen,
  • Liem Thanh Nguyen,
  • Huy Quang Tran and
  • Thuy Thi Thu Nguyen

Beilstein J. Nanotechnol. 2024, 15, 71–82, doi:10.3762/bjnano.15.7

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  • bonds, Fourier transform infrared spectroscopy (FTIR) was used to examine the differences in chemical characteristics of BBR-loaded PLA nanofiber scaffolds (Figure 2A). The FTIR spectrum of PLA nanofiber scaffold shows the adsorption peaks at 1751 cm−1 resulting from the stretching vibrations of the C=O
  • ImageJ software as an image analysis tool. Fourier-transform infrared spectroscopy was performed in a Nicolet NEXUS 670 spectrometer. The resulting spectra were recorded in transmission mode in the wavelength range of 500–4000 cm−1. A Raman spectrometer (MacroRAM, Horiba) was used to investigate the
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Published 12 Jan 2024

Influence of conductive carbon and MnCo2O4 on morphological and electrical properties of hydrogels for electrochemical energy conversion

  • Sylwia Pawłowska,
  • Karolina Cysewska,
  • Yasamin Ziai,
  • Jakub Karczewski,
  • Piotr Jasiński and
  • Sebastian Molin

Beilstein J. Nanotechnol. 2024, 15, 57–70, doi:10.3762/bjnano.15.6

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  • influence of porosity and conductive properties of these composites on the electrochemical activity of catalyst particles in OER. Elemental mapping by energy-dispersive X-ray spectroscopy (EDS) confirmed the presence of MCO particles inside the hydrogel structure (Figure 2 and Supporting Information File 1
  • MCO and cCB particles in the hydrogel precursor solution to obtain a more homogeneous distribution of these particles in the structure of the polymer matrix and on its surface. The Fourier-transform infrared spectroscopy (FTIR) results of the hydrogel compositions and their pure components are shown
  • (blocks) signals from other compounds. Electrical properties of hydrogel composites Electrochemical impedance spectroscopy was employed to characterise the electrical properties of hydrogel-based structures. The impedance modulus |Z| decreased with the increase in the amount of cCB contained in the
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Published 11 Jan 2024

TEM sample preparation of lithographically patterned permalloy nanostructures on silicon nitride membranes

  • Joshua Williams,
  • Michael I. Faley,
  • Joseph Vimal Vas,
  • Peng-Han Lu and
  • Rafal E. Dunin-Borkowski

Beilstein J. Nanotechnol. 2024, 15, 1–12, doi:10.3762/bjnano.15.1

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  • Joshua Williams Michael I. Faley Joseph Vimal Vas Peng-Han Lu Rafal E. Dunin-Borkowski Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, 52425 Jülich, Germany Faculty of Engineering, University Duisburg-Essen, 47057 Duisburg, Germany 10.3762/bjnano.15.1
  • Lorentz microscopy and electron holography, along with simultaneous structural and chemical characterization techniques such as electron diffraction, 4D STEM, and energy-dispersive X-ray (EDX) and electron energy loss spectroscopy (EELS), enable a correlative characterization to investigate magnetic
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Published 02 Jan 2024

A combined gas-phase dissociative ionization, dissociative electron attachment and deposition study on the potential FEBID precursor [Au(CH3)2Cl]2

  • Elif Bilgilisoy,
  • Ali Kamali,
  • Thomas Xaver Gentner,
  • Gerd Ballmann,
  • Sjoerd Harder,
  • Hans-Peter Steinrück,
  • Hubertus Marbach and
  • Oddur Ingólfsson

Beilstein J. Nanotechnol. 2023, 14, 1178–1199, doi:10.3762/bjnano.14.98

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  • (500 nm)/Si(111) In this experiment, 4 × 4 µm2 FEBID structures were written with [Au(CH3)2Cl]2 as the precursor using an acceleration voltage of 5 keV and a beam current of 1.5 nA. The fabricated structures were examined with scanning electron microscopy (SEM) and Auger electron spectroscopy (AES
  • three experiments. The FEBID structures were investigated by SEM and noncontact atomic force microscopy (AFM). Figure 3a shows the SEM images of the deposits along with the respective deposition parameters. Magnified sections from these SEM images are shown in Figure 3b. Auger electron spectroscopy was
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Published 06 Dec 2023

A multi-resistance wide-range calibration sample for conductive probe atomic force microscopy measurements

  • François Piquemal,
  • Khaled Kaja,
  • Pascal Chrétien,
  • José Morán-Meza,
  • Frédéric Houzé,
  • Christian Ulysse and
  • Abdelmounaim Harouri

Beilstein J. Nanotechnol. 2023, 14, 1141–1148, doi:10.3762/bjnano.14.94

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  • scanning conditions, current and resistance mapping as well as I–V spectroscopy over a wide range of current measurement (from 100 µA to less than 100 fA) (see Supporting Information File 1, section S1). Previous experiments have shown diamond-coated tips to be most suitable for imaging gold surfaces in
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Published 22 Nov 2023

Curcumin-loaded albumin submicron particles with potential as a cancer therapy: an in vitro study

  • Nittiya Suwannasom,
  • Netsai Sriaksorn,
  • Chutamas Thepmalee,
  • Krissana Khoothiam,
  • Ausanai Prapan,
  • Hans Bäumler and
  • Chonthida Thephinlap

Beilstein J. Nanotechnol. 2023, 14, 1127–1140, doi:10.3762/bjnano.14.93

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  • . SEM images were obtained under high-vacuum conditions at an operation voltage of 15 kV. Fourier-transform infrared spectroscopy Chemical characteristics of CUR, HSA, HSA-MPs, and CUR-HSA-MPs were examined using Fourier-transform infrared spectroscopy (FTIR, Thermo Scientific, NICOLET IS5, Waltham, MA
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Published 21 Nov 2023

Sulfur nanocomposites with insecticidal effect for the control of Bactericera cockerelli

  • Lany S. Araujo-Yépez,
  • Juan O. Tigrero-Salas,
  • Vicente A. Delgado-Rodríguez,
  • Vladimir A. Aguirre-Yela and
  • Josué N. Villota-Méndez

Beilstein J. Nanotechnol. 2023, 14, 1106–1115, doi:10.3762/bjnano.14.91

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  • rosemary essential oils with the three concentrations of 0.25%, 0.5%, and 0.75%. The samples were characterized by UV–visible spectroscopy, energy-dispersive X-ray spectroscopy, transmission electron microscopy, and scanning electron microscopy. The insecticidal efficacy of the nanocomposites was evaluated
  • eucalyptus and rosemary at different concentrations. Characterizations were carried out through UV–visible spectroscopy, energy-dispersive X-ray spectroscopy (EDS), transmission electron microscopy (TEM), and scanning electron microscopy (SEM); also the insecticidal efficacy of the NCMPs for the control of
  • stabilizing agent. Characterization techniques and equipment UV–visible spectroscopy was performed on an Analytik Jena SPECORD® S 600 spectrophotometer. Size and morphology of the SNPs were determined using an FEI Tecnai G2 Spirit Twin transmission electron microscope. Energy-dispersive X-ray spectroscopy
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Published 17 Nov 2023

Properties of tin oxide films grown by atomic layer deposition from tin tetraiodide and ozone

  • Kristjan Kalam,
  • Peeter Ritslaid,
  • Tanel Käämbre,
  • Aile Tamm and
  • Kaupo Kukli

Beilstein J. Nanotechnol. 2023, 14, 1085–1092, doi:10.3762/bjnano.14.89

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  • grazing incidence X-ray diffractometry (GIXRD), using an X-ray diffractometer SmartLab Rigaku with Cu Kα radiation, which corresponds to an X-ray wavelength of 0.15406 nm. X-ray photoelectron emission and X-ray absorption spectroscopy (XPS and XAS, respectively) measurements were made at the FinEstBeAMS
  • ]. The SnO2 films grown at 300 and 500 °C, that is, those with low residual iodine content, were analysed ex situ in terms of surface chemistry using soft X-ray spectroscopy methods. The Sn 3d XPS data (Figure 10a) show almost identical spectra for the samples deposited at 300 and 500 °C, and the narrow
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Published 13 Nov 2023

Dual-heterodyne Kelvin probe force microscopy

  • Benjamin Grévin,
  • Fatima Husainy,
  • Dmitry Aldakov and
  • Cyril Aumaître

Beilstein J. Nanotechnol. 2023, 14, 1068–1084, doi:10.3762/bjnano.14.88

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  • mode (DHe-KPFM spectroscopy), and 2D dynamic images can be acquired in data cube mode. The capabilities of DHe-KPFM in terms of time-resolved measurements, surface photovoltage (SPV) imaging, and detection of weak SPV signals are demonstrated through a series of experiments on difference surfaces: a
  • measurements [16], which consists in analysing the intermodulation products between the mechanical oscillation of the cantilever and the photogenerated surface potential. In short, intermodulation spectroscopy allows working in the frequency domain (instead of the time domain) by extracting, during a single
  • , alike intermodulation spectroscopy [16], time-resolved measurements can be performed by DHe-KPFM by recording several harmonics of the SPV signal. To that end, we implemented (as detailed hereafter in the “DHe-KPFM implementation” section) a spectroscopic variant which allows recording onto 2D grid
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Published 07 Nov 2023

Experimental investigation of usage of POE lubricants with Al2O3, graphene or CNT nanoparticles in a refrigeration compressor

  • Kayhan Dağıdır and
  • Kemal Bilen

Beilstein J. Nanotechnol. 2023, 14, 1041–1058, doi:10.3762/bjnano.14.86

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  • nanoparticles is presented separately in the subsequent sections to verify the catalog information provided by the manufacturer. In the characterization of the nanoparticles used in the study, field-emission scanning electron microscopy (FE-SEM), energy-dispersive X-ray spectroscopy (EDS), and X-ray diffraction
  • . Thus, the Raman spectroscopy of graphene nanoplatelets which yield optimal enhancement in required compressor electrical power are presented in Figure 15. Figure 15 shows that the graphene used in this study has characteristic G (1564 cm−1) and 2D (2680 cm−1) bands. A low intensity D band (1343 cm−1
  • compressor electrical power for the usage of nanolubricants with a) Al2O3, b) graphene, and c) CNTs. Required compressor electrical power for nanolubricants with optimum mass fraction of nanoparticles. Raman spectroscopy of the graphene nanoplatelets. XPS of the graphene nanoplatelets. Kinematic viscosity of
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Published 02 Nov 2023

A visible-light photodetector based on heterojunctions between CuO nanoparticles and ZnO nanorods

  • Doan Nhat Giang,
  • Nhat Minh Nguyen,
  • Duc Anh Ngo,
  • Thanh Trang Tran,
  • Le Thai Duy,
  • Cong Khanh Tran,
  • Thi Thanh Van Tran,
  • Phan Phuong Ha La and
  • Vinh Quang Dang

Beilstein J. Nanotechnol. 2023, 14, 1018–1027, doi:10.3762/bjnano.14.84

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  • . The energy-dispersive X-ray spectroscopy (EDS) results in Figure 1c show Zn, Cu, and O, which indicates the presence of ZnO and CuO. No further impurities were found. The results from X-ray diffractometry (XRD) and UV–vis absorption spectroscopy confirm that the nanoparticles covering the surfaces and
  • composition of the materials. The morphology of pure CuO NPs and CuO NPs/ZnO NRs was examined by field-emission scanning electron microscopy. UV–vis absorption spectroscopy showed the optical properties of the materials. The photodetector performance was studied through the current–voltage (I–V
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Published 13 Oct 2023

Exploring internal structures and properties of terpolymer fibers via real-space characterizations

  • Michael R. Roenbeck and
  • Kenneth E. Strawhecker

Beilstein J. Nanotechnol. 2023, 14, 1004–1017, doi:10.3762/bjnano.14.83

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  • ) spectroscopy, and (iii) fiber tensile properties. Interestingly, although Technora® is noncrystalline, it can be effectively modeled through XRD as a paracrystalline material such as Kevlar®. Within this framework, the Technora® paracrystalline distortion parameter, a measure of crystalline “sinuosity”, was
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Published 05 Oct 2023

Nanoarchitectonics of photothermal materials to enhance the sensitivity of lateral flow assays

  • Elangovan Sarathkumar,
  • Rajasekharan S. Anjana and
  • Ramapurath S. Jayasree

Beilstein J. Nanotechnol. 2023, 14, 988–1003, doi:10.3762/bjnano.14.82

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  • spectroscopy (SERS), fluorescence, ultrasound, and photothermal methods, have been tried in LFAs [4][13][14]. For example, fluorescence-based LFAs exhibited a 100- to 1000-fold higher sensitivity than conventional LFAs [15]. However, working with fluorescence-based LFAs is complex because of photoinstability
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Published 04 Oct 2023

Isolation of cubic Si3P4 in the form of nanocrystals

  • Polina K. Nikiforova,
  • Sergei S. Bubenov,
  • Vadim B. Platonov,
  • Andrey S. Kumskov,
  • Nikolay N. Kononov,
  • Tatyana A. Kuznetsova and
  • Sergey G. Dorofeev

Beilstein J. Nanotechnol. 2023, 14, 971–979, doi:10.3762/bjnano.14.80

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  • nanoparticles with a defective zinc blende structure under mild conditions through thermal annealing of hydrogenated silicon nanoparticles with red phosphorus. The synthesized Si3P4 nanoparticles were analyzed using FTIR, XRD, electron diffraction, EDX, TEM, Raman spectroscopy, X-ray fluorescence spectrometry
  • FTIR spectroscopy of the etching product are shown in Figure 1). The bands with the wavenumbers of 2105 and 2900 cm−1, and the broad signal at 3400 cm−1 were attributed to vibrations of Si–H, C–H, and O–H bonds, respectively [25]. The IR spectra of the unetched Si NPs display bands in a wavenumber
  • control over the width of the bandgap through selection of the composition. Conclusion A synthesis of freestanding Si3P4 NPs with cubic crystal structure was successfully carried out and corroborated by XRD, TEM, EDX, electron diffraction, and Raman spectroscopy. The cell parameter of the experimentally
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Published 26 Sep 2023

Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor

  • Mathias Franz,
  • Mahnaz Safian Jouzdani,
  • Lysann Kaßner,
  • Marcus Daniel,
  • Frank Stahr and
  • Stefan E. Schulz

Beilstein J. Nanotechnol. 2023, 14, 951–963, doi:10.3762/bjnano.14.78

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  • saturation behaviour of the process was investigated. X-ray photoelectron spectroscopy measurements could show that the deposited cobalt is in the metallic state. The finally established process in ALD mode shows a homogeneous coating at the wafer level. Keywords: atomic layer deposition (ALD); cobalt; low
  • with a deposition rate of approximately 0.1 Å/cycle. The deposited films were analysed by X-ray photoelectron spectroscopy and are well in the metallic state. We also show the optimization of the overall process through varying the pulse times for precursor, purging, and the plasma pulse. Experimental
  • metallic cobalt according to Ward [24] combined with a Tauc–Lorentzian model for possible occurrences of oxidised cobalt [25][26]. The film compositions were measured ex situ by X-ray photoelectron spectroscopy (XPS) on a PRECAV sp. Z. o. o. XPS system using a MX-650 Al X-ray source and a R3000 analyser
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Published 15 Sep 2023
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