Focused ion and electron beams for synthesis and characterization of nanomaterials

• Aleksandra Szkudlarek

Beilstein J. Nanotechnol. 2025, 16, 613–616, doi:10.3762/bjnano.16.47

• Aleksandra Szkudlarek Academic Centre for Materials and Nanotechnology, AGH University of Krakow, av. Mickiewicza 30, 30-059, Krakow, Poland 10.3762/bjnano.16.47 Keywords: deposition; etching; focused electron beams; focused ion beams; lithography; milling; nanofabrication; 3D nanostructures; It

• , Aleksandra Szkudlarek Krakow, April 2025 Complexity of interactions among electrons, ions, and precursor molecules behind fabrication of functional 3D nanostructures.

Electron beam-based direct writing of nanostructures using a palladium β-ketoesterate complex

• Chinmai Sai Jureddy,
• Krzysztof Maćkosz,
• Aleksandra Butrymowicz-Kubiak,
• Iwona B. Szymańska,
• Patrik Hoffmann and
• Ivo Utke

Beilstein J. Nanotechnol. 2025, 16, 530–539, doi:10.3762/bjnano.16.41

• )2] [40][41]. The potential of growing 3D nanostructures with this precursor was also explored. The insights gained from this research could be valuable in the development of precursors tailored for FEBID. Experimental The structure of [Pd(tbaoac)2] is shown in Figure 1. The precursor was synthesized

• occurring on the pillar walls in the present case, eventually causing lower volume growth rate for pillars. The tip of the high-aspect ratio pillar follows the electron beam profile without any depletion at the center, further demonstrating the potential of the [Pd(tbaoac)2] precursor for creating 3D

• nanostructures in FEBID applications. Conclusion In this study, we investigated palladium deposits obtained with [Pd(tbaoac)2], having non-fluorinated β-ketoesterate ligands, in the FEBID process. Under the given experimental conditions, square deposits exhibited a central dip, indicating a significant surface

Electron-induced ligand loss from iron tetracarbonyl methyl acrylate

• Hlib Lyshchuk,
• Atul Chaudhary,
• Thomas F. M. Luxford,
• Miloš Ranković,
• Jaroslav Kočišek,
• Juraj Fedor,
• Lisa McElwee-White and
• Pamir Nag

Beilstein J. Nanotechnol. 2024, 15, 797–807, doi:10.3762/bjnano.15.66

• (FEBID). FEBID is an emerging method for the fabrication of 3D nanostructures. It relies on the local decomposition of precursors in the focal area of an electron beam [1][2][3][4]. In the case of deposition of metals, the interaction with the electrons should ideally lead to a cleavage of all metal

Electron-induced deposition using Fe(CO)₄MA and Fe(CO)₅ – effect of MA ligand and process conditions

• Hannah Boeckers,
• Atul Chaudhary,
• Petra Martinović,
• Amy V. Walker,
• Lisa McElwee-White and
• Petra Swiderek

Beilstein J. Nanotechnol. 2024, 15, 500–516, doi:10.3762/bjnano.15.45

• electron beam-induced surface activation (EBISA) [24][25], it can compromise spatial control by the electron beam and selectivity when aiming for 3D nanostructures [3][26]. Strategies to suppress autocatalytic deposit growth are thus desirable to devise FEBID processes with optimum performance [27

• then writes patterns into the condensed layer followed by warming up to room temperature to remove the intact precursor from the non-irradiated areas. While cryo-FEBID is less versatile with respect to the fabrication of 3D nanostructures, the processing speed is much higher than for room-temperature

Biocatalytic synthesis and ordered self-assembly of silica nanoparticles via a silica-binding peptide

• Mustafa Gungormus

Beilstein J. Nanotechnol. 2023, 14, 280–290, doi:10.3762/bjnano.14.25

• structures, high cost, labor-intensiveness, resolution limits, and high throughput time limit the scalability [8]. Self-assembly allows to circumvent some of the constraints of the top-down techniques to obtain ordered 2D or 3D nanostructures. Self-assembly, however, presents challenges of its own. One major

Effects of focused electron beam irradiation parameters on direct nanostructure formation on Ag surfaces

• Jānis Sniķeris,
• Vjačeslavs Gerbreders,
• Andrejs Bulanovs and
• Ēriks Sļedevskis

Beilstein J. Nanotechnol. 2022, 13, 1004–1010, doi:10.3762/bjnano.13.87

• nanopatterning of metal surfaces, but it is a complicated and expensive multistep process [8]. Electron beam induced deposition (EBID) is a direct-write lithography technique, which is capable of creating 2D and free-standing 3D nanostructures by using electron irradiation to dissociate volatile precursor

Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition

• Cristiano Glessi,
• Aya Mahgoub,
• Cornelis W. Hagen and
• Mats Tilset

Beilstein J. Nanotechnol. 2021, 12, 257–269, doi:10.3762/bjnano.12.21

• the deposit. A major challenge is therefore to achieve control over the composition of the deposited material through a proper design of the precursor molecule [17][18]. Gold deposition has been one of the earliest interests in FEBID [19], as gold 3D-nanostructures can find a wide range of

Towards 3D self-assembled rolled multiwall carbon nanotube structures by spontaneous peel off

• Jonathan Quinson

Beilstein J. Nanotechnol. 2020, 11, 1865–1872, doi:10.3762/bjnano.11.168

• for other more complex nanomaterials remains underexploited. We recently proposed new approaches to prepare such complex materials [16]. In this work it is explored how template-free 3D nanostructures can be obtained by using CNTs with junctions. Results To develop new ways to induce a compositional

Nanostructure-induced performance degradation of WO₃·nH₂O for energy conversion and storage devices

• Zhenyin Hai,
• Mohammad Karbalaei Akbari,
• Zihan Wei,
• Danfeng Cui,
• Chenyang Xue,
• Hongyan Xu,
• Philippe M. Heynderickx,
• Francis Verpoort and
• Serge Zhuiykov

Beilstein J. Nanotechnol. 2018, 9, 2845–2854, doi:10.3762/bjnano.9.265

• in a faster performance degradation, due to its weak interlayer van der Waals forces, even though it outranks the 3D network structure in terms of improved electronic properties. The structural transformation of 2D layered WO3·nH2O into 3D nanostructures is observed via ex situ Raman measurements

• , revealing that the weakness of layered 2D WO3·nH2O originates from weak interlayer van der Waals interactions. The faster performance degradation in electrochemical tests of 2D layered WO3·nH2O further indicated the structural instability of 2D nanostructures compared to 3D nanostructures. The structural

• samples synthesized at 180 °C remains almost unaffected after CV tests. The investigation of Raman spectra further supports the relative electrochemical instability of WO3·2H2O and WO3·H2O compared to WO3. Conclusion In summary, WO3·nH2O (n = 0, 1, 2) synthesized in 2D and 3D nanostructures by a facile

Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

• Lukas Keller and
• Michael Huth

Beilstein J. Nanotechnol. 2018, 9, 2581–2598, doi:10.3762/bjnano.9.240

• nanomagnetic 3D structures which can, for example, show novel types of magnetic domain walls [3], or concerning magnetically frustrated interactions in 3D artificial spinice systems [4]. Being able to fabricate 3D nanostructures is thus beneficial for both the development of new technological applications and

• addressing more fundamental research questions. Several sophisticated techniques have been developed to prepare 3D nanostructures, but fabrication without constraints on their shape and material composition remains an enormous challenge. One state-of-the-art approach to fabricated 3D systems on the nanoscale

• has already been shown to be very useful in obtaining plasmonically active, all-metal 3D nanostructures when combined with a suitably adapted postgrowth purification treatment [22]. Adopting general guidelines for optimizing the 3D writing strategy [22][24], we showed in a collaborative work that high

High-throughput micro-nanostructuring by microdroplet inkjet printing

• Hendrikje R. Neumann and
• Christine Selhuber-Unkel

Beilstein J. Nanotechnol. 2018, 9, 2372–2380, doi:10.3762/bjnano.9.222

• ]. Using electron-beam lithography, it is possible to generate such patterns with very high spatial precision [5]. Focused electron beam induced deposition (FEBID) even serves as a method to deposit 3D nanostructures without the need of masks [6]. A further and very successful method to write gold

Electron interaction with copper(II) carboxylate compounds

• Michal Lacko,
• Peter Papp,
• Iwona B. Szymańska,
• Edward Szłyk and
• Štefan Matejčík

Beilstein J. Nanotechnol. 2018, 9, 384–398, doi:10.3762/bjnano.9.38

• materials for preparation of thin layers or 3D nanostructures. Complexes and metalorganic compounds are used as precursors in modern nano scale layer techniques. After activation, molecules undergo dissociation on the surface. Volatile parts of molecules are removed from the surface while a metal component

• low energy electrons (below 100 eV). These electrons can diffuse to the surface and initiate reactions in the precursor molecules. As a result, a deposit is formed. This technique enables the production of free standing 3D nanostructures and is already used commercially for the repair of

Comparative study of post-growth annealing of Cu(hfac)₂, Co₂(CO)₈ and Me₂Au(acac) metal precursors deposited by FEBID

• Marcos V. Puydinger dos Santos,
• Aleksandra Szkudlarek,
• Artur Rydosz,
• Carlos Guerra-Nuñez,
• Fanny Béron,
• Kleber R. Pirota,
• Stanislav Moshkalev,
• José Alexandre Diniz and
• Ivo Utke

Beilstein J. Nanotechnol. 2018, 9, 91–101, doi:10.3762/bjnano.9.11

• -based devices [28]. Furthermore, the possibility of depositing 3D nanostructures with high aspect ratio makes FEBID an adequate tool for the fabrication of advanced scanning-probe systems, as well as high-resolution ferromagnetic probes for magnetic force microscopy (MFM) [29][30][31]. Nevertheless, the

Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment

• Domagoj Belić,
• Mostafa M. Shawrav,
• Emmerich Bertagnolli and
• Heinz D. Wanzenboeck

Beilstein J. Nanotechnol. 2017, 8, 2530–2543, doi:10.3762/bjnano.8.253

• 2D and 3D nanostructures [1][2][3][4][5] with an ultimate resolution of less than 1 nm [6][7]. It is frequently referred to as "3D nanoprinting" because of its capabilities that are similar to the increasingly popular 3D printers that operate on the micrometer scale. FEBID has been only recently

• issue. For that reason, this study focuses on the optimization of deposition mechanism using a commercially available metal-organic gold precursor and explores oxygen-plasma treatment as a potentially viable large-scale postdeposition purification method for 2D and 3D nanostructures. Over the last few

• deposition [65]. That investigation explored a wide range of experimental FEBID parameters in a systematic manner, in order to yield a recipe for deposition of pristine 3D nanostructures with desired structural and compositional properties. With a systematic experimental approach to FEBID with metal carbonyl

Modelling focused electron beam induced deposition beyond Langmuir adsorption

• Dédalo Sanz-Hernández and
• Amalio Fernández-Pacheco

Beilstein J. Nanotechnol. 2017, 8, 2151–2161, doi:10.3762/bjnano.8.214

• model to simulate gas flow surface distribution when delivered from an injector [24], code that analytically and numerically solves FEBID continuum models [25], a hybrid Monte Carlo-continuum model to predict and guide the growth of 3D nanostructures [26], and a molecular dynamics model to give an

3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity

• Brett B. Lewis,
• Robert Winkler,
• Xiahan Sang,
• Pushpa R. Pudasaini,
• Michael G. Stanford,
• Harald Plank,
• Raymond R. Unocic,
• Jason D. Fowlkes and
• Philip D. Rack

Beilstein J. Nanotechnol. 2017, 8, 801–812, doi:10.3762/bjnano.8.83

• ]. For 3D objects, in situ purification methods are critical in applications requiring high fidelity shape retention due to the significant volumetric contraction associated with impurity removal [57]. In situ purification of complex 3D nanostructures is a significant challenge due to the large parameter

• Growth rates The relation between the vertical and lateral growth rates is a critical parameter required to accurately and reproducibly construct 3D nanostructures. Once this relation is known, the beam dwell time and pitch can be adjusted as necessary to construct more complex shapes [60]. A simple unit

• deposits, Pt grain coarsening and a decrease in resistivity are observed at higher dwell times/higher segment angles. The 3D nanostructures maintain high fidelity during laser irradiation and realize a 100-fold decrease in resistivity when compared to standard EBID. This improvement in electron transport

Nanostructured TiO₂-based gas sensors with enhanced sensitivity to reducing gases

• Wojciech Maziarz,
• Anna Kusior and
• Anita Trenczek-Zajac

Beilstein J. Nanotechnol. 2016, 7, 1718–1726, doi:10.3762/bjnano.7.164

• TiO2-based sensing materials were investigated. 2D TiO2 thin films crystallized mainly in the form of rutile, while the flower-like 3D nanostructures as anatase. The sensor based on the 2D TiO2 showed the best performance for H2 detection, while the flower-like 3D nanostructures exhibited enhanced

• selectivity to CO(CH3)2 after sensitization by SnO2 nanoparticles. The sensor response time was of the order of several seconds. Their fast response, high sensitivity to selected gas species, improved selectivity and stability suggest that the SnO2-decorated flower-like 3D nanostructures are a promising

• material for application as an acetone sensor. Keywords: acetone; flower-like 3D nanostructures; gas sensors; selectivity; titanium dioxide; Introduction The market for resistive-type gas sensors is dominated by materials developed on the base of thin or thick layers composed of polycrystalline metal

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

• Rachel M. Thorman,
• Ragesh Kumar T. P.,
• D. Howard Fairbrother and
• Oddur Ingólfsson

Beilstein J. Nanotechnol. 2015, 6, 1904–1926, doi:10.3762/bjnano.6.194

• applications. The advantages of FEBID stem from its ability to write 3D nanostructures of close to any geometry and to write on uneven surfaces. In FEBID (Figure 1), a focused high-energy electron beam impinges on a surface of a substrate that is continuously exposed to a gas stream of precursor molecules as a

Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

• Aleksandra Szkudlarek,
• Alfredo Rodrigues Vaz,
• Yucheng Zhang,
• Andrzej Rudkowski,
• Czesław Kapusta,
• Rolf Erni,
• Stanislav Moshkalev and
• Ivo Utke

Beilstein J. Nanotechnol. 2015, 6, 1508–1517, doi:10.3762/bjnano.6.156

• ], thermal sensors [8], photodetectors [9], and mode stabilizers for vertical surface emitting lasers [10]. Other deposits were used as ferromagnetic wires [11][12], superconducting wires [13], plasmonic structures [14], or as electrode nanocontacts [15][16]. The feasibility of obtaining 3D nanostructures

3D-nanoarchitectured Pd/Ni catalysts prepared by atomic layer deposition for the electrooxidation of formic acid

• Loïc Assaud,
• Evans Monyoncho,
• Kristina Pitzschel,
• Anis Allagui,
• Matthieu Petit,
• Margrit Hanbücken,
• Elena A. Baranova and
• Lionel Santinacci

Beilstein J. Nanotechnol. 2014, 5, 162–172, doi:10.3762/bjnano.5.16

• thickness and size of Pd particles, but also because of the electronic effects between the alloyed Pd/Ni metals or because of the mass transport effect in 3D nanostructures. This explains the trend of higher peak current densities for the electrooxidation of formic acid at a lower Pd content in the Pd/Ni