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Search for "focused ion beam" in Full Text gives 124 result(s) in Beilstein Journal of Nanotechnology.

Thickness-dependent photoelectrochemical properties of a semitransparent Co3O4 photocathode

  • Malkeshkumar Patel and
  • Joondong Kim

Beilstein J. Nanotechnol. 2018, 9, 2432–2442, doi:10.3762/bjnano.9.228

Graphical Abstract
  • focused ion beam system (FIB, FEI, Quanta 3D FEG). The elemental compositions in the cross sections of the Co3O4 layers in the working electrode were determined as line profiles by an energy dispersive spectroscopy (EDS) attachment to the FETEM. Thickness and average surface roughness of the deposited
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Published 12 Sep 2018

Hydrothermal-derived carbon as a stabilizing matrix for improved cycling performance of silicon-based anodes for lithium-ion full cells

  • Mirco Ruttert,
  • Florian Holtstiege,
  • Jessica Hüsker,
  • Markus Börner,
  • Martin Winter and
  • Tobias Placke

Beilstein J. Nanotechnol. 2018, 9, 2381–2395, doi:10.3762/bjnano.9.223

Graphical Abstract
  • -sections were prepared by a focused ion beam (FIB) milling process using gallium ions extracted from a high brightness liquid metal ion source. Nitrogen adsorption experiments were performed on a 3Flex Physisorption device (Micromeritics GmbH) at the temperature of liquid nitrogen (−196 °C). Before the
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Published 05 Sep 2018

Directional light beams by design from electrically driven elliptical slit antennas

  • Shuiyan Cao,
  • Eric Le Moal,
  • Quanbo Jiang,
  • Aurélien Drezet,
  • Serge Huant,
  • Jean-Paul Hugonin,
  • Gérald Dujardin and
  • Elizabeth Boer-Duchemin

Beilstein J. Nanotechnol. 2018, 9, 2361–2371, doi:10.3762/bjnano.9.221

Graphical Abstract
  • milled in the gold film using a focused ion beam (FIB) at the NanoFab facility (Institut Néel, Grenoble, France). A scanning electron microscopy image of an elliptical slit is shown in Supporting Information File 1. Schematics of the experiment. A single (a) circular or (b) elliptical slit etched in a
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Published 03 Sep 2018

Two-dimensional photonic crystals increasing vertical light emission from Si nanocrystal-rich thin layers

  • Lukáš Ondič,
  • Marian Varga,
  • Ivan Pelant,
  • Alexander Kromka,
  • Karel Hruška and
  • Robert G. Elliman

Beilstein J. Nanotechnol. 2018, 9, 2287–2296, doi:10.3762/bjnano.9.213

Graphical Abstract
  • with etching [14] or focused ion beam milling [15] are used to prepare photonic structures with well-defined dimensions on small areas. These approaches are therefore suitable for laboratory testings but not for practice. This issue was recently solved by developing large-scale production techniques
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Published 24 Aug 2018

Intrinsic ultrasmall nanoscale silicon turns n-/p-type with SiO2/Si3N4-coating

  • Dirk König,
  • Daniel Hiller,
  • Noël Wilck,
  • Birger Berghoff,
  • Merlin Müller,
  • Sangeeta Thakur,
  • Giovanni Di Santo,
  • Luca Petaccia,
  • Joachim Mayer,
  • Sean Smith and
  • Joachim Knoch

Beilstein J. Nanotechnol. 2018, 9, 2255–2264, doi:10.3762/bjnano.9.210

Graphical Abstract
  • SiO2-layer to facilitate the preparation of cross sections by the focused ion beam technique using a FEI Strata FIB 205 workstation. Some samples were further thinned by means of a Fischione NanoMill. The TEM analysis of the cross sections was performed on a FEI Tecnai F20 TEM operated at 200 kV at the
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Published 23 Aug 2018

High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography

  • Kahraman Keskinbora,
  • Umut Tunca Sanli,
  • Margarita Baluktsian,
  • Corinne Grévent,
  • Markus Weigand and
  • Gisela Schütz

Beilstein J. Nanotechnol. 2018, 9, 2049–2056, doi:10.3762/bjnano.9.194

Graphical Abstract
  • ) radiation; focused ion beam (FIB); Fresnel zone plate; ion beam lithography (IBL); nanopatterning; soft X-rays; Introduction Requirements for focusing elements that work at extreme ultraviolet (EUV) and soft X-ray (SXR) energies are very different from those of the more familiar ultraviolet, visible or
  • (SEM), focused ion beam (FIB) dual-beam instrument, installed with a lithography attachment (Please see the Experimental section for details). Several exposure, milling or patterning strategies can be adopted in an IBL process. A few such processing procedures relevant to present work are illustrated
  • the beam path), the current and the dwell time need to be precisely adjusted. Following the structuring of the zones, a ca. 3 µm thick beamstop was deposited in the central inactive region via focused ion beam induced deposition (FIBID) of Pt using trimethyl(cyclopentadienyl)platinum(IV), (CH3
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Published 25 Jul 2018

Know your full potential: Quantitative Kelvin probe force microscopy on nanoscale electrical devices

  • Amelie Axt,
  • Ilka M. Hermes,
  • Victor W. Bergmann,
  • Niklas Tausendpfund and
  • Stefan A. L. Weber

Beilstein J. Nanotechnol. 2018, 9, 1809–1819, doi:10.3762/bjnano.9.172

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  • stronger lateral averaging of the AM-KPFM in lift mode and the presence of a stray electric field. Such a field could originate from gallium ions deposited into the glass substrate during the focused ion beam polishing of the cross section. Our general recommendation for quantitative device measurements is
  • compact MAPI capping layer, the hole transport material spiro-OMETAD and a gold electrode. Prior to the measurement the cross section of the solar cell was polished with a focused ion beam (FIB) to minimize topographic crosstalk. The CPD line profiles in a) were extracted from double side band frequency
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Published 15 Jun 2018

Magnetic properties of Fe3O4 antidot arrays synthesized by AFIR: atomic layer deposition, focused ion beam and thermal reduction

  • Juan L. Palma,
  • Alejandro Pereira,
  • Raquel Álvaro,
  • José Miguel García-Martín and
  • Juan Escrig

Beilstein J. Nanotechnol. 2018, 9, 1728–1734, doi:10.3762/bjnano.9.164

Graphical Abstract
  • .9.164 Abstract Magnetic films of magnetite (Fe3O4) with controlled defects, so-called antidot arrays, were synthesized by a new technique called AFIR. AFIR consists of the deposition of a thin film by atomic layer deposition, the generation of square and hexagonal arrays of holes using focused ion beam
  • variable lattice parameters. Keywords: antidot arrays; atomic layer deposition; focused ion beam; magnetic properties; thermal reduction; Introduction Magnetic antidots, magnetic thin films with periodic arrays of holes, are currently an important topic for both the fundamental understanding of low
  • [23] and colloidal [24] lithography, porous anodic alumina [25][26], block copolymer templates [27], nanochannel glass [28] and focused ion beam (FIB) patterning [29][30]. Recently, we have proposed the fabrication of disordered antidot arrays through the thermal reduction of thin films synthesized by
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Published 11 Jun 2018

Toward the use of CVD-grown MoS2 nanosheets as field-emission source

  • Geetanjali Deokar,
  • Nitul S. Rajput,
  • Junjie Li,
  • Francis Leonard Deepak,
  • Wei Ou-Yang,
  • Nicolas Reckinger,
  • Carla Bittencourt,
  • Jean-Francois Colomer and
  • Mustapha Jouiad

Beilstein J. Nanotechnol. 2018, 9, 1686–1694, doi:10.3762/bjnano.9.160

Graphical Abstract
  • sulfurized Mo films on SiO2/Si substrates was characterized using field-emission scanning electron microscopy (FE-SEM) combined with a Helios FEITM NanoLab 650 focused ion beam (FIB) system. Transmission electron microscopy (TEM) lamella were prepared using the standard FIB lift-out technique described in an
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Published 07 Jun 2018

Friction force microscopy of tribochemistry and interfacial ageing for the SiOx/Si/Au system

  • Christiane Petzold,
  • Marcus Koch and
  • Roland Bennewitz

Beilstein J. Nanotechnol. 2018, 9, 1647–1658, doi:10.3762/bjnano.9.157

Graphical Abstract
  • tip height. One Au/Si tip apex was analyzed by transmission electron microscopy (TEM; JEM-2100(HR) LaB6, JEOL GmbH, Eching, Germany, 200 kV acceleration voltage) after activation on Au(111) and sliding experiments. The tip was cut using a focused ion beam (Versa3D; FEI, Eindhoven, Netherlands) to a
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Published 05 Jun 2018

Interaction-tailored organization of large-area colloidal assemblies

  • Silvia Rizzato,
  • Elisabetta Primiceri,
  • Anna Grazia Monteduro,
  • Adriano Colombelli,
  • Angelo Leo,
  • Maria Grazia Manera,
  • Roberto Rella and
  • Giuseppe Maruccio

Beilstein J. Nanotechnol. 2018, 9, 1582–1593, doi:10.3762/bjnano.9.150

Graphical Abstract
  • ; this is why a proper fabrication tool, able to guarantee good flexibility, is required to meet research goals. Typically, the fabrication of nanostructured systems involves techniques such as electron beam and focused ion beam lithography in order to realize arrays of nanoscale features with precise
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Published 29 May 2018

Correlative electrochemical strain and scanning electron microscopy for local characterization of the solid state electrolyte Li1.3Al0.3Ti1.7(PO4)3

  • Nino Schön,
  • Deniz Cihan Gunduz,
  • Shicheng Yu,
  • Hermann Tempel,
  • Roland Schierholz and
  • Florian Hausen

Beilstein J. Nanotechnol. 2018, 9, 1564–1572, doi:10.3762/bjnano.9.148

Graphical Abstract
  • detail, a different preparation method has been employed to obtain a significantly smoother LATP surface. Figure 4 shows an SEM picture of the area on LATP sintered at 1000 °C that was polished by means of a focused ion beam (FIB). Please note that the color contrast is inverted in this case as the SEM
  • preannealing, shaping, pressing and sintering in air at 1000 °C or 1050 °C for 8 h as indicated. For both AFM as well as SEM measurements, the pellets were subject to a polishing step by hand polishing or by focused-ion beam. Hand polishing Smooth LATP surfaces suitable for SEM and AFM analysis were achieved
  • master polish. Afterwards, the pellets were rinsed thoroughly with isopropanol. Focused-ion beam polishing For comparison, a second sample was additionally polished using a focused-ion beam (FEI (now Thermo-Fisher) Helios 460F1) [33]. For this, a polished SEM sample was used. A protective Pt-layer the
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Published 28 May 2018

Absence of free carriers in silicon nanocrystals grown from phosphorus- and boron-doped silicon-rich oxide and oxynitride

  • Daniel Hiller,
  • Julian López-Vidrier,
  • Keita Nomoto,
  • Michael Wahl,
  • Wolfgang Bock,
  • Tomáš Chlouba,
  • František Trojánek,
  • Sebastian Gutsch,
  • Margit Zacharias,
  • Dirk König,
  • Petr Malý and
  • Michael Kopnarski

Beilstein J. Nanotechnol. 2018, 9, 1501–1511, doi:10.3762/bjnano.9.141

Graphical Abstract
  • (≈40 K) and a chamber pressure of 10−12–10−11 Torr. The atom detection efficiency is 57%. For data reconstruction IVAS™ software (version 3.6.6) was used. APT specimen (needle-shaped tips attached onto the apex of a Mo support grid) were structured using an Auriga (Zeiss) focused ion beam scanning
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Published 18 May 2018

A novel copper precursor for electron beam induced deposition

  • Caspar Haverkamp,
  • George Sarau,
  • Mikhail N. Polyakov,
  • Ivo Utke,
  • Marcos V. Puydinger dos Santos,
  • Silke Christiansen and
  • Katja Höflich

Beilstein J. Nanotechnol. 2018, 9, 1220–1227, doi:10.3762/bjnano.9.113

Graphical Abstract
  • . Cross-sectional samples from planar deposits for imaging by TEM were prepared by a focused ion beam (FIB) lift-out technique in a Zeiss Crossbeam 340 KMAT. TEM on the cross-sections was performed on a JEOL JEM2200fs CM12. SAED pattern indexing was carried out using CSpot software (CrystOrient
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Published 18 Apr 2018

Effect of annealing treatments on CeO2 grown on TiN and Si substrates by atomic layer deposition

  • Silvia Vangelista,
  • Rossella Piagge,
  • Satu Ek and
  • Alessio Lamperti

Beilstein J. Nanotechnol. 2018, 9, 890–899, doi:10.3762/bjnano.9.83

Graphical Abstract
  • [25]. Focused ion beam has been used to prepare lamellae of selected samples for transmission electron microscopy (TEM) analysis (cross and plan view, Fei Tecnai G2) in bright or dark field at a voltage of 200 kV. Plan view images are treated with free software to obtain the crystallite size
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Published 15 Mar 2018

Single-step process to improve the mechanical properties of carbon nanotube yarn

  • Maria Cecilia Evora,
  • Xinyi Lu,
  • Nitilaksha Hiremath,
  • Nam-Goo Kang,
  • Kunlun Hong,
  • Roberto Uribe,
  • Gajanan Bhat and
  • Jimmy Mays

Beilstein J. Nanotechnol. 2018, 9, 545–554, doi:10.3762/bjnano.9.52

Graphical Abstract
  • ). CNT yarn is cylindrical and the diameter ranges between 50 a 60 µm. The tensile testing of the yarn samples were kept constant in terms of length of 25.4 mm. The morphology of CNT yarns was investigated using a Zeiss Auriga dual beam focused ion beam (FIB) and scanning electron microscope (SEM) in
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Published 13 Feb 2018

Al2O3/TiO2 inverse opals from electrosprayed self-assembled templates

  • Arnau Coll,
  • Sandra Bermejo,
  • David Hernández and
  • Luís Castañer

Beilstein J. Nanotechnol. 2018, 9, 216–223, doi:10.3762/bjnano.9.23

Graphical Abstract
  • layers of 360 nm polystyrene nanoparticles can be seen. The layer is almost free of defects besides some missing beads that can be identified in the top surface. A focused ion beam (FIB) drill in two orthogonal vertical planes confirms that the order is fully three-dimensional. The total thickness of the
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Published 19 Jan 2018

Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits

  • Fan Tu,
  • Martin Drost,
  • Imre Szenti,
  • Janos Kiss,
  • Zoltan Kónya and
  • Hubertus Marbach

Beilstein J. Nanotechnol. 2017, 8, 2592–2605, doi:10.3762/bjnano.8.260

Graphical Abstract
  • well-defined configurations for building integrated systems for micro- and nanoelectronics. In this regard, classical methods like optical lithography (OL) [13] and electron beam lithography (EBL) [14], but also focused ion beam (FIB) processing [15], have been successfully applied to fabricate
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Published 05 Dec 2017

Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment

  • Domagoj Belić,
  • Mostafa M. Shawrav,
  • Emmerich Bertagnolli and
  • Heinz D. Wanzenboeck

Beilstein J. Nanotechnol. 2017, 8, 2530–2543, doi:10.3762/bjnano.8.253

Graphical Abstract
  • widely utilized [8][9][10] due to the growing number of modern scanning electron microscopes (SEMs) which can be combined with focused ion beam (FIB) systems that are equipped with gas injection systems by default. Rather than being merely characterization instruments, such SEMs are now becoming
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Published 29 Nov 2017

Magnetic properties of optimized cobalt nanospheres grown by focused electron beam induced deposition (FEBID) on cantilever tips

  • Soraya Sangiao,
  • César Magén,
  • Darius Mofakhami,
  • Grégoire de Loubens and
  • José María De Teresa

Beilstein J. Nanotechnol. 2017, 8, 2106–2115, doi:10.3762/bjnano.8.210

Graphical Abstract
  • observation in a specific geometry. Firstly, the cantilever pyramid tip is cut by focused ion beam (FIB) milling and lifted-out by a micromanipulator. Then, the cantilever tip is welded onto a TEM copper grid by a FIB-induced Pt deposition, as illustrated in Figure 3a. Then, the FEBID cobalt nanosphere is
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Published 09 Oct 2017

Growth, structure and stability of sputter-deposited MoS2 thin films

  • Reinhard Kaindl,
  • Bernhard C. Bayer,
  • Roland Resel,
  • Thomas Müller,
  • Viera Skakalova,
  • Gerlinde Habler,
  • Rainer Abart,
  • Alexey S. Cherevan,
  • Dominik Eder,
  • Maxime Blatter,
  • Fabian Fischer,
  • Jannik C. Meyer,
  • Dmitry K. Polyushkin and
  • Wolfgang Waldhauser

Beilstein J. Nanotechnol. 2017, 8, 1115–1126, doi:10.3762/bjnano.8.113

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  • incident angle of αi = 0.13° was chosen to enhance the scattered intensities of the adsorbate. The angular scans have been transferred to scattering vector notation using q = 4πsin(Θ)/λxt. Scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX) and focused ion beam (FIB
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Published 22 May 2017

Ion beam profiling from the interaction with a freestanding 2D layer

  • Ivan Shorubalko,
  • Kyoungjun Choi,
  • Michael Stiefel and
  • Hyung Gyu Park

Beilstein J. Nanotechnol. 2017, 8, 682–687, doi:10.3762/bjnano.8.73

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  • , Department of Mechanical and Process Engineering, Eidgenössische Technische Hochschule (ETH) Zürich, Tannenstrasse 3, CH-8092 Zürich, Switzerland 10.3762/bjnano.8.73 Abstract Recent years have seen a great potential of the focused ion beam (FIB) technology for the nanometer-scale patterning of a
  • source. Our method of profiling ion beams with 2D-layer perforation provides more information on ion beam profiles than the conventional sharp-edge scan method does. Keywords: exposure dose; focused ion beam; freestanding 2D layer; graphene; ion beam diameter; ion beam point spread function
  • focused ion beam across the knife edge can change the edge shape because of a milling effect incurred by the ion beam irradiation itself. Increasing the scan speed over the edge in order to avert the damage, gives rise to other problems such as shot noise and statistical beam fluctuations. Another
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Published 23 Mar 2017

Flexible photonic crystal membranes with nanoparticle high refractive index layers

  • Torben Karrock,
  • Moritz Paulsen and
  • Martina Gerken

Beilstein J. Nanotechnol. 2017, 8, 203–209, doi:10.3762/bjnano.8.22

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  • (SEM). The cross-section was created with a focused ion beam (FIB). To protect the cutting edge, a layer of platinum was added on top of the sample. The structure itself is emphasized because of charging effects at the PDMS material border. For optical enhancement dotted guiding lines were drawn into
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Published 20 Jan 2017

Grazing-incidence optical magnetic recording with super-resolution

  • Gunther Scheunert,
  • Sidney. R. Cohen,
  • René Kullock,
  • Ryan McCarron,
  • Katya Rechev,
  • Ifat Kaplan-Ashiri,
  • Ora Bitton,
  • Paul Dawson,
  • Bert Hecht and
  • Dan Oron

Beilstein J. Nanotechnol. 2017, 8, 28–37, doi:10.3762/bjnano.8.4

Graphical Abstract
  • -fields antiparallel to the DC field, and thus created a more manageable background. Transmission electron microscopy (TEM) cross-sectional imaging was done on a sample lamella prepared via focused ion beam (FIB) of one of the Seagate platters to identify the thin-film layer structure used for modelling
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Published 04 Jan 2017

Annealing-induced recovery of indents in thin Au(Fe) bilayer films

  • Anna Kosinova,
  • Ruth Schwaiger,
  • Leonid Klinger and
  • Eugen Rabkin

Beilstein J. Nanotechnol. 2016, 7, 2088–2099, doi:10.3762/bjnano.7.199

Graphical Abstract
  • ) on the Au (111) reflection. Cross-section samples were prepared in a dual-beam focused ion beam microscope (FIB; FEI Strata 400-S). Appendix Topography evolution of an axisymmetrical indent by surface diffusion (small slope approximation) To check whether surface diffusion alone can lead to indent
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Published 28 Dec 2016
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